The authors report the growth of semipolar (112¯2) GaN films on nominally on-axis (101¯0) m-plane sapphire substrates using metal organic chemical vapor deposition. High-resolution x-ray diffraction (XRD) results indicate a preferred (112¯2) GaN orientation. Moreover, epitaxial lateral overgrowth (ELO) of GaN was carried out on the (112¯2) oriented GaN templates. When the ELO stripes were aligned along [112¯0]sapphire, the Ga-polar wings were inclined by 32° with respect to the substrate plane with smooth extended nonpolar a-plane GaN surfaces and polar c-plane GaN growth fronts. When compared with the template, the on-axis and off-axis XRD rocking curves indicated significant improvement in the crystalline quality by ELO for this mask orientation (on-axis 1700arcsec for the template, 380arcsec for the ELO sample, when rocked toward the GaN m axis), as verified by transmission electron microscopy (TEM). For growth mask stripes aligned along [0001]sapphire with GaN m-plane as growth fronts, the surface was composed of two {101¯1} planes making a 26° angle with the substrate plane. For this mask orientation XRD and TEM showed no improvement in the crystalline quality by ELO when compared to the non-ELO template.
We report the growth of InGaN/GaN multiple-quantum-well blue light-emitting diode (LED) structures on Si(111) using metalorganic vapor phase epitaxy. By using growth conditions optimized for sapphire substrates, a full width at half maximum (FWHM) (102) x-ray rocking curve of less than 600 arcsec and a room-temperature photoluminescence peak at 465 nm with a FWHM of 35 nm was obtained. Simple LEDs emitting bright electroluminescence between 450 and 480 nm with turn-on voltages at 5 V were demonstrated.
The competition between band gap and the 2.2 eV ͑yellow͒ luminescence of epitaxial GaN is studied for excitation densities ranging from 5ϫ10 Ϫ6 to 50 W/cm 2. The ratio of the peak intensities of the band gap-to-yellow luminescence changes from 4:1 to 3000:1 as the excitation density is increased by 7 orders of magnitude. At room temperature, the band gap luminescence linewidth is 2.3kT, close to the theoretical minimum of 1.8kT. A model is developed describing the intensity of the two radiative transitions as a function of the excitation density. This model is based on bimolecular rate equations and takes into account shallow impurities, deep levels, and continuum states. The theoretically predicted dependences of the two different luminescence channels follow power laws with exponents of 1 2 , 1 and 3 2. Thus the intensity of the yellow luminescence does not saturate at high excitation densities. These dependences are in excellent agreement with experimental results. The relevance of the results for optoelectronic GaN devices is discussed. It is shown that the peak intensity of the yellow luminescence line is negligibly small at typical injection currents of light-emitting diodes and lasers.
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