Abstract. A 20-MHz switching high-speed light-modulating device for three-dimensional (3-D) image capturing and its system prototype are presented. For 3-D image capturing, the system utilizes a time-of-flight (TOF) principle by means of a 20-MHz high-speed micromachined electroabsorptive modulator, the so-called optical shutter. The high-speed modulation is obtained by utilizing the electro-absorption mechanism of the multilayer structure, which has an optical resonance cavity and lightabsorption epilayers grown by metal organic chemical vapor deposition process. The optical shutter device is specially designed to have small resistor-capacitor-time constant to get the high-speed modulation. The optical shutter is positioned in front of a standard high-resolution complementary metal oxide semiconductor image sensor. The optical shutter modulates the incoming infrared image to acquire the depth image. The suggested novel optical shutter device enables capturing of a full high resolution-depth image, which has been limited to video graphics array (VGA) by previous depth-capturing technologies. The suggested 3-D image sensing device can have a crucial impact on 3-D-related business such as 3-D cameras, gesture recognition, user interfaces, and 3-D displays. This paper presents micro-opto-electro-mechanical systemsbased optical shutter design, fabrication, characterization, 3-D camera system prototype, and image evaluation. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
For reliable three dimensional (3D) imaging system, it is necessary for the optical shutter to have a wide spectral bandwidth operation and enhanced modulation depth. We propose an electro-absorption modulator (EAM) based on coupled Fabry-Perot cavities with micro-cavity (CCMC) which uses asymmetric tandem quantum wells (ATQWs) to obtain improved spectral bandwidth and enhanced modulation depth. Several modulator designs are investigated to obtain improved modulation performance such as wider spectral bandwidth and enhanced modulation depth. It was found that among all the studied modulator geometries, CCMC structure with ATQWs provides the widest spectral bandwidth of 9.6nm and high modulation depth in excess of 50% at -24V, which is good agreement with theoretical calculations. These results suggest that EAM has excellent potential as optical shutter for 3D imaging application.
Large aperture image modulators used as demodulator in receiver path are an important component for the use in three dimensional (3D) image sensing. For practical applications, low voltage operation and high modulation performance are the key requirements for modulators. Here, we propose an asymmetric Fabry-Perot modulator (AFPM) with asymmetric tandem quantum wells (ATQWs) for 3D image sensing. By using ATQWs for the AFPM design, the device operated at -4.25V, and the operating voltage was significantly lower by about 23% compared to -5.5V of a conventional AFPM with 8nm thick multiple QW with a single QW thickness (SQWs), while achieving high reflectivity modulation in excess of 50%. The performance of the fabricated devices is in good agreement with theoretical calculations. The pixelated device shows a high modulation speed of 21.8 MHz over a large aperture and good uniformity. These results show that AFPM with ATQWs is a good candidate as an optical image modulator for 3D image sensing applications.
A time-of-flight (TOF) based three dimensional (3D) image capturing system and its enhanced optical modulating device are presented. The 3D image capturing system includes 850nm IR emitter (typically compact Laser diodes) and high speed image modulator, so called optical shutter. The optical shutter consists of multi-layered optical resonance cavity and electro-absorptive layers. The optical shutter is a solid-state controllable filter which modulates the IR image to extract the phase delay due to TOF of the emitting IR light. This presentation especially addresses robustness issues and solutions when operated under practical environments such as ambient temperature variation and existence of strong ambient light (e.g. outdoors). The wavelength of laser diode varies substantially depending on the ambient temperature, which degrades the modulation efficiency. To get a robust operation, the bandwidth of transmittance of the optical shutter is drastically improved with a novel coupled Fabry-Perot resonance cavity design to come up with the wavelength variation of the laser diode. Also, to suppress the interference of solar irradiance to IR source signal, a novel driving scheme is applied, in which IR light and optical shutter modulation duties are timely localized, i. e. 'bursted'.Suggested novel optical shutter design and burst driving scheme enable capturing of a full HD resolution of depth image under the realistic usage environments, which so far tackle the commercialization of TOF cameras. Design, fabrication, and evaluation of the optical shutter; and, 3D capturing system prototype, image test results are presented.
We propose and demonstrate a new electro-absorption modulator (EAM) based on coupled tandem cavities (CTC) having asymmetric tandem quantum well (ATQW) structure with separated electrode configuration to achieve large transmittance change over a broad spectral range at low driving voltage for high definition (HD) 3D imaging applications. Our theoretical calculations show that CTC with ATQW structure can provide large transmittance change over a wide spectral range at low driving voltage. By introducing separated electrode configuration, the fabricated EAM having CTC with ATQW structure shows a large transmittance change over 50%, almost three times larger spectral bandwidth compared to that of EAM having single cavity with a single thickness quantum well without significantly increasing the applied voltage. In addition, the CTC with ATQW structure also shows high speed modulation up to 28 MHz for the device having a large area of 2 mm x 0.5 mm. This high transmittance change, large spectral bandwidth and low voltage operation over a large device area for the EAM having CTC with ATQW demonstrates their huge potential as an optical image modulator for HD 3D imaging applications.
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