This paper presents a novel method to fabricate separated macroporous silicon using a single step of photo-assisted electrochemical etching. The method is applied to fabricate silicon microchannel plates in 100 mm p-type silicon wafers, which can be used as electron multipliers and three-dimensional Li-ion microbatteries. Increasing the backside illumination intensity and decreasing the bias simultaneously can generate additional holes during the electrochemical etching which will create lateral etching at the pore tips. In this way the silicon microchannel can be separated from the substrate when the desired depth is reached, then it can be cut into the desired shape by using a laser cutting machine. Also, the mechanism of lateral etching is proposed.
Recently micro-energetic devices by integrating the energetic materials into micro-electromechanical systems (MEMS) to meet the requirements of energy and function diversity have attracted attention from many researchers. Here the technology of modified electrochemical corrosion which is fully compatible with standard microelectronic manufacturing is reported and used to prepare the porous silicon array with a high area ratio. The micro-energetic device was realized by integrating the energetic material lead picrates into the microchannel of porous silicon array. The structure and properties of porous silicon array/lead picrates were characterized by scanning electron microscope (SEM), X-ray diffraction (XRD) and differential scanning calorimetry (DSC), respectively. The results obtained from these analysis demonstrated that the energetic materials lead picrates is integrated into microchannel of porous silicon array successfully and the heat from DSC equal to 796.05J/g suggests that thermal decomposition of lead picrates inside the microchannel of porous silicon array takes place, indicating the micro-energetic device in this paper posses the function of producing gas. Meanwhile, the micro-energetic device exhibits lower ignition temperature compared to other energetic devices. Therefore, this will enhance energy performances and the function diversity for MEMS devices.
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