The implementation of a polarization beam splitter (PBS) on a silicon nitride platform remains challenging owing to its relatively low index. We therefore propose a silicon nitride PBS that exploits serially cascaded asymmetric directional couplers (ADCs), leading to a high polarization extinction ratio (PER) over a broad bandwidth. The ADC spatially routes incident light through polarization-selective mode coupling under a small footprint of 112 µm. The proposed PBS does not require an active phase control. It is thus effectively realized via a single-step lithography process. The measured transverse-electric and transverse-magnetic PERs were determined to be above 23 dB and 10 dB over an 80-nm bandwidth, respectively, spanning λ = 1520 − 1600 n m . The proposed device is thus anticipated to play a key role in providing polarization diversity in photonic-integrated circuits.

An optical phased array (OPA) in silicon nitride (SiN) is conspicuously highlighted as a vital alternative to its counterpart in silicon. However, a limited number of studies have been conducted on this array in terms of wavelength-tuned beam steering. A SiN OPA has been proposed and implemented with a grating antenna that incorporated an array of shallow-etched waveguides, rendering wavelength-tuned beam steering along the longitudinal direction. To accomplish a superior directionality on a wavelength-tuned beam steering, the spectral beam emission characteristics of the antenna have been explored from the viewpoint of a planar structure that entails a buried oxide (BOX), a SiN waveguide core, and an upper cladding. Two OPA devices having substantially different thicknesses of the resonant cavities, established by combining the BOX and SiN core, were considered theoretically and experimentally to scrutinize the spectral emission characteristics of the antenna on beam steering. Both of the fabricated OPA devices steered light by an angle of 7.4° along the longitudinal direction for a wavelength ranging from 1530 to 1630 nm, while they maintained a divergence angle of 0.2°×0.6° in the longitudinal and lateral directions. Meanwhile, the OPA fabricated on a substantially thick BOX layer featured a limited steering performance to attain a stabilized response over a broad spectral region. We examined the influence of the cavity thickness on the spectral response of the antenna in terms of optical thickness. Based on the two antenna characteristics, it was confirmed that the grating antenna emitted the beam with a higher efficiency when the optical thickness of the cavity corresponded to odd integer multiples of the quarter wavelength. This work is a considerable strategy for designing a stabilized SiN OPA over a desired spectral region.

We propose and demonstrate an optical phased-array-based bidirectional grating antenna (BDGA) in silicon nitride waveguides. The BDGA is integrated with a miniaturized all-dielectric metasurface doublet (MD) formed on a glass substrate. The BDGA device, which takes advantage of alternately feeding light to its ports in opposite directions, is presumed to effectively provide a doubled wavelength-tuned steering efficiency compared to its unidirectional counterpart. The MD, which is based on vertically cascaded convex and concave metalenses comprising circular hydrogenated amorphous silicon nanopillars, is meticulously placed atop the BDGA chip to accept and deflect a beam emanating from the emission area, thereby boosting the beam-steering performance. The manufactured BDGA could achieve an enhanced beam-steering efficiency of 0.148 deg/nm as well as a stable spectral emission response in the wavelength range of 1530–1600 nm. By deploying a fabricated MD atop the silicon photonic BDGA chip, the steering efficiency was confirmed to be boosted by a factor of ∼ 3.1 , reaching 0.461 deg/nm, as intended.

We have proposed and experimentally realized an ultra-compact and broadband silicon nitride edge-coupler that enables high coupling efficiency. The proposed coupler was realized by concatenating short tapers in four stages, whose angles were designed to minimize the footprint while preserving the coupling efficiency. The constituting taper segments were designed by carefully sectioning a long adiabatic taper while adapting to an appropriate taper angle for each segment. The designed coupler exhibited an extremely short footprint of 76 μm. A coupling efficiency of 92% was experimentally attained at 1550 nm wavelength when coupled to a single-mode fiber having a mode field diameter of ~4 μm. Further, an efficiency of over 90% throughout the C and L bands was observed. A 3-dB bandwidth of 965 nm, spanning λ =1015-1980 nm, was achieved in the simulation. Additionally, the fabricated device exhibited an enhanced cleaving tolerance by virtue of its elongated tip, along with relaxed alignment tolerances ranging up to 3.5 μm. The proposed design was also found to comply with the waveguides having widths between 1 μm and 4 μm without affecting the overall footprint and efficiency. This work is anticipated to provide a promising foundation for the development of compact photonic devices.

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