2021
DOI: 10.1109/jlt.2021.3070386
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Hybrid Integrated Silicon Nitride–Polymer Optical Phased Array For Efficient Light Detection and Ranging

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Cited by 31 publications
(12 citation statements)
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“…Among these, the polymer waveguide thermo-optic phase modulator (TOPM) displays efficient phase modulation operated by low electric power owing to its high thermo-optic (TO) effect and excellent heat isolation property [ 6 , 7 ]. Therefore, when the polymer phase modulators are placed as an array with small pitches for an optical phased array (OPA) beam scanner device, thermal crosstalk between the adjacent channels is suppressed, enabling independent control of each channel [ 7 , 8 ].…”
Section: Introductionmentioning
confidence: 99%
“…Among these, the polymer waveguide thermo-optic phase modulator (TOPM) displays efficient phase modulation operated by low electric power owing to its high thermo-optic (TO) effect and excellent heat isolation property [ 6 , 7 ]. Therefore, when the polymer phase modulators are placed as an array with small pitches for an optical phased array (OPA) beam scanner device, thermal crosstalk between the adjacent channels is suppressed, enabling independent control of each channel [ 7 , 8 ].…”
Section: Introductionmentioning
confidence: 99%
“…Polymers have been utilized for the fabrication of novel LiDAR devices. In [ 49 , 50 ], a polymeric thermo-optic phase modulator was fabricated and utilized for OPA LiDAR ( Figure 3 a), achieving good energy efficiency. In [ 51 ], piezoelectric polymer P(VDF-TrFE) copolymers were employed as actuators, introducing rotation to the micromirror of the MEMS LiDAR due to the asymmetric position of the mirror ( Figure 3 b).…”
Section: Sensors and Sensor-based Odometry Methodsmentioning
confidence: 99%
“…PIC has the great potential to integrate the key components of OPA such as the laser, beam splitters, phase modulator arrays, antennas, and photodetectors on a single chip [50][51][52]. The phase modulators can utilize the thermo-optic [53,54] or electro-optic effect [55] to tilt the far-field wavefront, which can obtain the steered beam.…”
Section: Pic-opamentioning
confidence: 99%