Optical phased array (OPA) devices are being actively investigated to develop compact solid-state beam scanners, which are essential in fields such as LiDAR, free-space optical links, biophotonics, etc. Based on the unique nature of perfluorinated polymers, we propose a polymer waveguide OPA with the advantages of low driving power and high optical throughput. Unlike silicon photonic OPAs, the polymer OPAs enable sustainable phase distribution control during beam scanning, which reduces the burden of beamforming. Moreover, by incorporating a tunable wavelength laser comprising a polymer waveguide Bragg reflector, two-dimensional beam scanning is demonstrated, which facilitates the development of laser-integrated polymeric OPA beam scanners.
Polymer waveguide phase modulators exhibit stable low-power phase modulation owing to their exceptional thermal confinement and high thermo-optic effect, and thus, have the merit of thermal isolation between channels, which is crucial for an optical phased array (OPA) beam scanner device. In this work, a waveguide phase modulator was designed and fabricated based on a high-refractive-index fluorinated polyimide. The propagation loss of the polyimide waveguide and the temporal response of the phase modulator were characterized. Moreover, the transfer function of the phase modulator including multiple poles and zeros was obtained from the measured frequency response. The polyimide waveguide modulator device demonstrated a fast response time of 117 μs for 1 kHz input signal, however, for 1 mHz step-function input, it exhibited an additional 5% phase change in 5 s.
Conventional OPAs incorporating a diffraction grating were mainly developed to achieve a two-dimensional spot beambased scan, which inevitably requires a wide range of wavelength tuning, leading to unaffordable complexity and limited scanning speed. In this study, we demonstrate a hybrid OPA that capitalizes on a silicon nitride line beam emitter based on tapered waveguides array, which facilitates efficient line beam scanning exhibiting flexible vertical field-of-views (FOVs) at a wavelength of 1550 nm. The line beam is horizontally scanned by driving an array of hybrid-integrated thermo-optic polymer phase modulators. The vertical FOV can be flexibly adjusted by varying the tip widths of the tapers and thus the angular divergence of emitted beams, leading to flexible FOVs ranging from 30°× 14°to 30°× 47°. A lens module is particularly devised and tethered to the OPA, thereby further tailoring and amplifying the FOVs along vertical and horizontal directions. The proposed hybrid OPA in conjunction with a lens module was practically manufactured to efficiently substantiate desired line beam scanning, achieving FOVs ranging from 51°× 0.6°to 51°× 10.3°. The developed line-beam-based OPA is anticipated to play an integral role in embodying an advanced LiDAR system featuring fast beam scanning.
Optical phased array (OPA) beam scanners for light detection and ranging (LiDAR) are proposed by integrating polymer waveguides with superior thermo-optic effect and silicon nitride (SiN) waveguides exhibiting strong modal confinement along with high optical power capacity. A low connection loss of only 0.15 dB between the polymer and SiN waveguides was achieved in this work, enabling a low-loss OPA device. The polymer-SiN monolithic OPA demonstrates not only high optical throughput but also efficient beamforming and stable beam scanning. This novel integrative approach highlights the potential of leveraging heterogeneous photonic materials to develop advanced photonic integrated circuits with superior performance.
The phase error imposed in optical phased arrays (OPAs) for beam scanning LiDAR is unavoidable due to minute dimensional fluctuations that occur during the waveguide manufacturing process. To compensate for the phase error, in this study, a fast-running beamforming algorithm is developed based on the rotating element vector method. The proposed algorithm is highly suitable for OPA devices comprised of polymer waveguides, where thermal crosstalk between phase modulators is suppressed effectively, allowing for each phase modulator to be controlled independently. The beamforming speed is determined by the number of phase adjustments. Hence, by using the least square approximation for a 32-channel polymer waveguide OPA device the number of phase adjustments needed to complete beamforming was reduced and the beamforming time was shortened to 16 seconds.
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