Vanadium dioxide thin film nanostructures were synthesized by pulsed laser deposition on soda lime glass at a substrate temperature of 600°C and an oxygen ambient pressure of 15 mTorr. The effect of cooling pressure on the crystalline orientation of VO 2 nanostructures was investigated. As the cooling oxygen pressure is increased, the VO 2 nanostructures exhibit sharp a-axis diffraction peaks, showing the growth of (1 0 0) oriented VO 2 on glass, which is characteristic of the VO 2 monoclinic phase and implies that pure highly a-axis textured VO 2 was formed. We found that the growth mechanism and substrate-film interaction play important roles in the development of these well-textured films via the formation of an interlayer of SiO 2 .
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