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With the help of the PIXE and RBS methods, the elemental composition of a ceramic coating on Zr alloy, surface layers of heat treated TiNi alloy, and Ar + implanted pyrolytic graphite is investigated. It is shown that the PIXE and RBS methods are complementary and their combined use can provide additional information on the elemental composition of the surface layers. It was determined that the microarc oxida tion of Zr alloy in an electrolyte with addition of ultrafine Y 2 O 3 powder leads to introduction of Y in the sub strate material. An effect of the surface segregation of Ti was found in TiNi alloy after the heat treatment.