An electron spin resonance (ESR) system was modified to conduct microwave Hall effect (MHE) measurements, but the ESR capability of the system was fully retained using interchangeable equipment. An X-band microwave frequency, a square-law detector, and phase-sensitive detection of the ESR signal were utilized during the modification. The ESR cavity was replaced with a bimodal MHE cavity and source modulation was used instead of field modulation. A cancelling channel was added to cancel out the non-ideal power at the secondary mode. A vector network analyser was used to tune the cavity and to measure the mobility of high mobility samples. A bimodal TE112 cylindrical cavity and a TE102 rectangular cavity were designed and constructed, and both gave good results. Silicon semiconductor samples, which had previously been well characterized, were used to calibrate the system and calculate the calibration constants.
A new method for time-resolved measurement of pulsed plasmas is suggested for reducing the measurement time. A short impulse has a broadband spectrum, and it can be used to make a spectrum in a short time. The use of a cutoff probe with a Fourier analysis (Fourier Cutoff Probe, FCP) provides the absolute electron densities with high speed. The measurement results from the FCP show good agreement with Langmuir probe's measurement results. However, it took only 1 minute 45 seconds using the FCP to make the temporal profile of electron densities in a pulsed plasma, versus 46 minutes for the Langmuir probe. The FCP's measurement was about 26 times faster than that by the Langmuir probe. This method will provide researchers a faster and convenient diagnostic method for pulsed plasmas.
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