Directed self-assembly of block copolymer polystyrene-block-polydimethylsiloxane by combining graphoepitaxy using nanoimprinted polyhedral oligomeric silsesquioxanes thin films as substrates and solvent annealing resulted in the BCP microphase segregation. For this purpose, the substrates for graphoepitaxy were fabricated by patterning the soft material POSS as thin films on silicon with nanoimprint lithography. The directed self-assembly of PS-b-PDMS resulted in the microphase segregation of PDMS cylinders with 25 nm pore diameter imbedded in a PS matrix. By modulating the hydrophobicity of POSS substrates, it was possible to control the orientation of the PDMS cylinders. For more hydrophobic POSS surfaces, the cylinders oriented parallel to the side walls surfaces whereas in more hydrophilic POSS surfaces the cylinders were oriented perpendicular to the side walls.
The NILaustria research project cluster consists of 8 individual research projects and aims to improve nanoimprint lithography in an application driven approach. The cluster is presented as well as highlights from the projects, e.g. the replication of 12.5nm half pitch features using working stamp copies, topics from organic electronics, metamaterials and SiGe technology. An outlook on the new activities is given.
For selective growth of Carbon Nanotubes (CNTs) or Carbon Nanofibres (CNFs) a print technique was used to distribute the catalyst on the substrate surface. Suspensions of Fe 3 O 4 nanoparticles (NPs) (~ 15-20 nm) in chloroform (CHCl 3 ) were prepared and printed by a soft nano-imprinting lithography process (NIL) on quartz and silicon substrates. After printing and evaporation of the solvent the catalyst distribution on the substrate surfaces was investigated. After different types of pre-treatments the hot-filament CVD followed depositing nanotubes and nanofibres.
composites can be obtained by the infiltration of molecular titanium precursors into presintered α-Al 2 O 3 (corundum) cylinders. Two titanium tetraalkoxides, and two dialkoxy titanium bis(acetylacetonates) serve as precursors for TiO 2 (rutile) and Al 2 TiO 5 (tialite). The precursors were infiltrated as ethanolic solutions. After sintering at 1550, 1600, and 1650°C, the prepared ceramics' properties were investigated by SEM, in-situ HT-XRD, and conventional XRD. Titanium tetraisopropoxide leads to the highest content of Al 2 TiO 5 in the composite. The more reactive the precursor, considering the Al 2 O 3 /precursor interface, the lower and more anisotropic the grain growth, the more homogeneous is the TiO 2 contribution and the higher is the content of Al 2 TiO 5 . Raising the sintering temperature causes an increase of the crystalline Al 2 TiO 5 con tent as well as of the grain growth. Moreover, the reactivity of the precursor molecule influences the Ti/(Al + Ti) ratio in the obtained tialite phase.
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