Single photon emitters in solid-state crystals have received a lot of attention as building blocks for numerous quantum technology applications. Fluorescent defects in hexagonal boron nitride (hBN) stand out due to their high luminosity and robust operation at room temperature. The fabrication of identical emitters at pre-defined sites is still challenging, which hampers the integration of these defects in optical systems and electro-optical devices. Here, we demonstrate the localized fabrication of hBN emitter arrays by electron beam irradiation using a standard scanning electron microscope with deep sub-micron lateral precision. The emitters are created with a high yield and a reproducible spectrum peaking at 575 nm. Our measurements of optically detected magnetic resonance have not revealed any addressable spin states. Using density functional theory, we attribute the experimentally observed emission lines to carbon-related defects, which are activated by the electron beam. Our scalable approach provides a promising pathway for fabricating room temperature single photon emitters in integrated quantum devices.

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Quantum emitters in solid-state crystals have recently attracted a lot of attention due to their simple applicability in optical quantum technologies. Color centers such as fluorescent defects hosted by diamond and hexagonal boron nitride (hBN) emit single photons at room temperature and can be used for nanoscale sensing. The atomic structure of the hBN defects, however, is not yet well understood. In this work, we fabricate an array of identical hBN emitters by localized electron irradiation. This allows us to correlate the dipole orientations with the host crystal axes. The angle of excitation and emission dipoles relative to the crystal axes are also calculated using density functional theory, which reveals characteristic angles for every specific defect. Moreover, we also investigate the temporal polarization dynamics and discover a mechanism of time-dependent polarization visibility and dipole orientation of color centers in hBN and diamond. This can be traced back to the excitation of excess charges in the local crystal environment. We therefore provide a promising pathway for the identification of color centers as well as important insight into the dynamics of solid-state quantum emitters.

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