New units and modified constructional components of an optical channel of a scanning X-Y laser nanolithographer are described. The nanolithographer serves for direct laser writing of subwavelength diffractive structures on thin-film photo- and thermo-sensitive materials deposited on planar transparent glass substrates. Significant changes were introduced into a unit of spatial frequency filtration, expansion and collimation of the laser beam of a writing laser. A new unit for on-line in-situ inspection of written diffractive structure is a unit of backward incoherent illumination.
The paper presents the results of the development and research of a precision piezoelectric Y-coordinate drive for a circular laser writing system. The developed drive is designed to correct the direction of the linear scan path of the recording beam to align it with the center of rotation of the substrate.
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