The relevance of the study is due to the fact that in the conditions of development of micro-and nanoelectronics, it is necessary to pay attention to resistive switching systems, which are the basis in the structures of these areas of electronics. The work deals with the investigation of the role of thin dielectric layers of silicon oxide and nitride on interconnection heating dynamics at monocrystalline silicon plates. The leading method to the study of this problem is the method of experiment, which allows identifying the features of the influence of the dielectric sublayer on the thermal regimes of multilayer systems. It is shown that passage of current pulses (amplitude up to 6x1010 A/m² and duration up to 600 μs) leads to thermal damage of interconnections right up to breaking the electric circuit. The character of destruction strongly depends on the quality of deposition of dielectric and metal films as well as on the state of the dielectric-metal interface. It was found that the oscillograms of the inclusion, taken during the passage of a current pulse, clearly reflect the change in the dimensional (h2) and thermal (λ2) parameters of the dielectric sublayers; considered the thermal degradation mechanisms of the aluminum metallization systems with thin dielectric sublayers related to its melting; it was found that formation of melted zones is related to local reduction of film cross-section and consequently to the appearance of a melted zone that coagulates into drops in the course of current pulse passing and promotes breaking the electric circuit. The proposed method can be applied to assess the thermal properties of thin films of dielectrics.
This work is devoted to the study of the mechanical properties of porous ceramics based on diatomite. Based on the morphological analysis of the studied samples, the porous structure of ceramics (morphology and average pore diameter) was analyzed and the numerical value of the porosity of the samples (35...50%) was determined. The values of the static (70...115 GPa) and dynamic elastic modulus of the samples (37...50 GPa) were measured experimentally. The dependence of the dynamic modulus of porous diatomite ceramics on porosity is studied: the elastic modulus decreases with increasing porosity of the material. A decrease in the porosity of the material after deformation was also found. The formation of diatomite filaments after deformation of samples by compression at a rate of no more than 8 * 10-4 s-1 was detected.
The experimental and theoretical investigations of mechanical properties of porous materials are one of the priority areas of development of condensed matter physics. Diatomite ceramics can serve as a raw material for structural heat and sound insulating materials and additives to some types of cement, as a polisher for metals and marble. Diatomite-based ceramics are also used for thermal insulation in aluminum production. The foamdiatomite ceramics is a promising porous material. But the properties of diatomite ceramics are not well studied, which determines the relevance of the study. The main task of the present work is the investigation of porosity and elastic moduli of diatomite ceramics, as well as the effect of thermal treatment on its physical-mechanical properties. The work deals with studying mechanical properties of porous ceramics based on diatomite – asedimentary rock composed predominantly of shells with micro- and nanopores of 50 to 500 µm. From the results of studying the microstructure of porous diatomite-based ceramics, the average porosity of samples (~50%) was determined, and the values of static (35 to 45 GP?) and dynamic (0.3 to 0.8 GP?) elastic moduli were experimentally measured. It was found that the values of elastic moduli decrease as material porosity increases. The experiment showed that the elastic modulus of the considered high-porous material was two orders of magnitude less than that of the crystalline one.
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