The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to new grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including onedimensional (1D) nanowires/nanotubes, and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained efforts have been devoted to creating mechanical devices toward the ultimate limit of miniaturization-genuinely down to the molecular or even atomic scale. These ultrasmall movable structures, particularly nanomechanical resonators that exploit the vibratory motion in these 1D and 2D nano-toatomic-scale structures, offer exceptional device-level attributes, such as ultralow mass, ultrawide frequency tuning range, broad dynamic range, and ultralow power consumption, thus holding strong promises for both fundamental studies and engineering applications. In this Review, we offer a comprehensive overview and summary of this vibrant field, present the state-of-the-art devices and evaluate their specifications and performance, outline important achievements, and postulate future directions for studying these miniscule yet intriguing molecular-scale machines.
Graphene nano-mechanical resonators integrated over waveguides provide a powerful sensing platform based on the interaction of graphene with the evanescent wave. An integrated actuation scheme that does not compromise this interaction is required for optimal usage of the ultra-sensitive platform. Conventional electrical and optical actuation techniques are not favorable towards efficient utilization of the near-field interaction. We propose tuning and actuation of these resonators using on-chip optical gradient force due to the guided wave as an alternative to these conventional techniques. We have used the fundamental quasi-TM optical mode in a silicon waveguide in a finite-element model. We obtain a force–distribution that is spatially correlated with the fundamental mechanical mode of the graphene nano-mechanical resonator. We demonstrate that for an evanescent continuous-wave (CW) optical power of 8 μW, the resonant frequency of the device can be tuned by about 24.5%. With an intensity-modulated optical power ≤0.1 μW, the mechanical mode can be driven to nonlinearity. We also demonstrate cancellation of the Duffing nonlinearity at a CW power of 5.4 μW, which can be used to improve the linear dynamic range of vibration. The distributed optical gradient force can produce linear resonant amplitudes that are 50% higher than those obtained using conventional actuation schemes. This actuation scheme is robust against fluctuations in the evanescent optical power and in the refractive index of the side-cladding of the waveguide. This ensures minimal cross-talk from the optical mode to the mechanical mode in nano-mechanical sensing applications.
Bifurcation amplifiers are known for their extremely high sensitivity to weak input signals. We implement a bifurcation amplifier by harnessing the Duffing nonlinearity in a parametrically excited MoS 2 nano-electromechanical system. We utilize the ultra-sensitive switching response between the two states of the bifurcation amplifier to detect as well as register charge-fluctuation events. We demonstrate openloop real-time detection of ultra-low electrical charge perturbations of magnitude <10 e at room temperature. Furthermore, we show latching of the resonator onto one of the two states in response to short-lived charge fluctuations. These charge detectors offer advantages of roomtemperature operation and tunable operation in the radio frequency regime, which could open several possibilities in quantum sensing.
We present a scheme for on-chip optical transduction of strain and displacement of graphene-based nano-electro-mechanical systems (NEMS). A detailed numerical study on the feasibility of three silicon-photonic integrated circuit configurations is presented: the Mach-Zehnder interferometer (MZI), the micro-ring resonator, and the ring-loaded MZI. An index sensing based technique using an MZI loaded with a ring resonator with a moderate Q-factor of 2400 can yield a sensitivity of 28 fm/Hz and 6.5×10%/Hz for displacement and strain, respectively. Though any phase-sensitive integrated-photonic device could be used for optical transduction, here we show that optimal sensitivity is achievable by combining resonance with phase sensitivity.
We propose a scheme for sensitive local monitoring of mode hybridization in vertically asymmetric waveguides with a nano-optomechanical probe based on graphene. Extracting local information about mode hybridization is challenging using intensity measurements at the output or scanning optical probes over the waveguide. Transferring the information about the guided field profiles into the mechanical mode of graphene (with ultra-low-force sensitivity) using the optical gradient force allows for sensitive probing of the mode hybridization. In our proposed scheme, we estimate that a 100% change in the TE fraction of the fundamental quasi-TM waveguide mode would cause a change in the vibration amplitude of graphene on the order of 1000 pm. The limit of detection of the TE fraction is approximately 0.001. The change in the TE fraction due to index perturbations in the core and cladding can also be used for index sensing with responsivity on the order of 1000 pm change in vibration amplitude per refractive index unit and a limit of detection of 2 × 10 − 4 refractive index units. This work provides novel methods for applications in optomechanical modulation and sensing.
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