A compact, robust grating spectrometer based on an optimised micro-electro-mechanical grating mirror component has been developed, built, and characterised. The application of an oscillating reflection grating micro-mirror component as scanning dispersive element in a modified Czerny-Turner monochromator layout enables the design of compact grating spectrometers capable of acquiring full spectra using a single detector element. Designed for a wavelength range between 1200 and 1900 nm, the spectrometer features a spectral resolution of 10 nm with wavelength stability better than +/-0.5 nm. One-hundred scan spectra can be acquired in less than one second, or spectral changes can be monitored at time a resolution of less than 10 ms. In combination with a fibre-optic interface and a typical weight of less than 1 kg, this makes this novel type of fully portable micro-electro-mechanical near-IR scanning spectrometer an interesting alternative to existing spectrometers and opens a range of new applications, in particular the detection of major and minor components in the near-IR.
We present investigations of a new miniaturized NIR spectrometer with a size of only 10×8×8 cm3, and a MOEMS-scanning-grating chip as a main element. It works currently in a spectral range of 1200 to 1900 nm with a resolution of less than 10 nm using only one single InGaAs diode as a detector. One entire spectral measurement is done within 6 msec, calculated by a digital signal processor, which is included in the spectrometer. The MOEMS-scanning-grating chip is resonantly driven by a pulsed voltage of up to 36 V, has a grating plate 3×3 mm2, and reaches deflection angles of ±8 deg at 25 V. Control and investigation of the deflection angle, the static deformation, the spectral efficiency, and the mechanical shock resistance are key parameters to reach the spectrometer specifications. Results of these measurements and their influence on the spectrometer are discussed. Special etch control structures to monitor the fabrication process of the grating structure in the nanometer range, which can be easily done by microscopic inspection, are also presented
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