Signal processing for a single detector MOEMS based NIR micro spectrometer

Heberer, Andreas; Grüger, Heinrich; Zimmer, F.; Schenk, Harald; Kenda, A.; Frank, A.; Scherf, Werner

doi:10.1117/12.624990

Cited by 3 publications

(2 citation statements)

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“…At present, Germany’s Hiper Scan Company (Dresden, Germany) [ 23 ], Germany’s Fraunhofer Institute for Photonic Microsystems (IPMS) (Dresden, Germany) [ 8 ], and China’s Nanjing Intellisense Company(Jiangsu, China) [ 24 ] have developed their NIR spectrometers based on the scanning grating mirror in all of their systems. Because scanning gratings do not integrated a deflection angle sensor, the photodiode is used to replace the position-sensitive detector (PSD) to acquire the information about the deflection angle of the scanning mirror and the closed-loop control of the scanning mirror, which would enlarge and complicate the entire system.…”

Section: Introductionmentioning

confidence: 99%

A Control and Detecting System of Micro-Near-Infrared Spectrometer Based on a MOEMS Scanning Grating Mirror

Liu

Zhang

et al. 2018

Micromachines

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Based on the scanning grating mirror we developed, this paper presents a method of the precise control of a scanning grating mirror and of high-speed spectrum data detection. In addition, the system circuit of the scanning grating mirror control and spectrum signal detecting is designed and manufactured in this paper. The mirror control system includes a drive generator module, an amplitude detection module, a feedback control module, and a variable gain amplification (VGA) module; the detecting system includes a field programmable gate array (FPGA) main control module, a synchronous trigger module, an analog-digital conversion (ADC) module, and a universal serial bus (USB) interface module. The final results of the experiment show that the control system has successfully realized the precision control of the swing of the scanning grating mirror and that the detecting system has successfully realized the high-speed acquisition and transmission of the spectral signal and the angle signals. The spectrum has been reconstructed according to the mathematical relationship between the wavelength λ and the angle β of the mirror. The resolution of the spectrometer reaches 10 nm in the wavelength range of 800–1800 nm, the signal-to-noise ratio (SNR) of the spectrometer is 4562 at full scale, the spectrum data drift is 0.9% in 24 h, and the precision of the closed loop control is 0.06%.

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Section: Introductionmentioning

confidence: 99%

A Control and Detecting System of Micro-Near-Infrared Spectrometer Based on a MOEMS Scanning Grating Mirror

Liu

Zhang

et al. 2018

Micromachines

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“…Higher wavelength detectors are based on InGaAs or other highly sophisticated and expensive materials, thus the system costs are dominated by the detector. A new approach has been set up some years ago by the use of MEMS based technologies for moveable micro gratings [1]. Based on the MEMS scanning grating technology a NIR spectrometer for the range from 950 -1900 nm has been developed.…”

Section: Introductionmentioning

confidence: 99%

Progress of performance of MOEMS micro spectrometers through enhanced signal processing, detectors and system setup

et al. 2008

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Micro spectrometers have been realized by the use of MEMS based scanning grating chips several years ago. The main advantage is the requirement of a single detector instead of a detector array for micro spectrometers applying fixed gratings. Especially in the near infrared range beyond the detection limit of silicon detectors, this can help to reduce the system costs significantly. First measurements for test application have been performed successfully. Industrial applications require wide spectral range, high long term stability and sufficient computation power in the system itself to realize intelligent sensor heads for process monitoring and quality control. Through the recent time, many details have been improved. Extended InGaAs detectors have been used to extend the spectral range up to 2500nm. Improvements of the grating position readout improved the wavelength stability of the system even under tough operation conditions. The integration of faster digital signal processors opens the possibility to implement spectral evaluation algorithms into the system itself. Besides simple applications shown earlier like the selection of different kinds of plastic waste, now a more quantitative analysis can be achieved. For example the ethanol content of liquor samples has been measured and evaluated quantitatively

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