We demonstrate a reliable microfabrication process for a combined atomic force microscopy (AFM) and scanning electrochemical microscopy (SECM) measurement tool. Integrated cone-shaped sensors with boron doped diamond (BDD) or gold (Au) electrodes were fabricated from commercially available AFM probes. The sensor formation process is based on mature semiconductor processing techniques, including focused ion beam (FIB) machining, and highly selective reactive ion etching (RIE). The fabrication approach preserves the geometry of the original AFM tips resulting in well reproducible nanoscaled sensors. The feasibility and functionality of the fully featured tips are demonstrated by cyclic voltammetry, showing good agreement between the measured and calculated currents of the cone-shaped AFM-SECM electrodes.
Abstract. Insulated atomic force microscopy probes carrying gold conductive tips were fabricated and employed as bifunctional force and current sensors in electrolyte solutions under electrochemical potential control. The application of the probes for current-sensing imaging, force and current-distance spectroscopy as well as scanning electrochemical microscopy experiments was demonstrated.
Numerical simulations were performed to predict the amperometric response of conical electrodes used as atomic force microscopy-scanning electrochemical microscopy (AFM-SECM) probes. A simple general expression was derived which predicts their steady state limiting current as a function of their insulation sheath thickness and cone aspect ratio. Simulated currents were successfully compared with experimental currents. Geometrical parameters such as insulation angle and tip bluntness were then studied to determine their effect on the limiting current. Typical tip defects were also modeled using 3D simulations, and their influence on the current was quantified. Although obtained for SECM-AFM probes, these results are directly applicable to conical micro- and nanoelectrodes.
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