eingegangen: 21. 02. 97 angenommen: 11. 04. 97Thin SiO, films were deposited on Si at room temperature by plasma-and ozone-enhanced evaporation in an UHV chamber and characterised by ellipsometry, Auger electron spectroscopy and electrical measurements. "hile the opticai and stoichiometric properties correspond well to those of thermally grown SiO,, the electricai properties have to be optimised with regard to lower mobile charge carrier density and lower interface state density.Dünne Si0,-Filme wurden bei Raumtemperatur auf Si mit plasma-und ozon-unterstützter Verdampfung in einer UHV-Kammer abgeschieden und mittels Ellipsometrie, Augerelektronenspektroskopie und elektrischen Messungen charakterisiert. Wahrend die elektrischen und stochiometrischen Eigenschaften gut mit thermisch gewachsenem
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.