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Conductance measurements of a molecular wire, contacted between an epitaxial molecule-metal bond and the tip of a scanning tunnelling microscope, are reported. Controlled retraction of the tip gradually de-hybridizes the molecule from the metal substrate. This tunes the wire into the Kondo regime in which the renormalized molecular transport orbital serves as a spin impurity at half-filling and the Kondo resonance opens up an additional transport channel. Numerical renormalization group simulations suggest this type of behaviour to be generic for a common class of metal-molecule bonds. The results demonstrate a new approach to single-molecule experiments with atomic-scale contact control and prepare the way for the ab initio simulation of many-body transport through single-molecule junctions.

The propulsion of a liquid indium-tin micro-droplet by nanosecond-pulse laser impact is experimentally investigated. We capture the physics of the droplet propulsion in a scaling law that accurately describes the plasma-imparted momentum transfer, enabling the optimization of the laser-droplet coupling. The subsequent deformation of the droplet is described by an analytical model that accounts for the droplet's propulsion velocity and the liquid properties. Comparing our findings to those from vaporization-accelerated mm-sized water droplets, we demonstrate that the hydrodynamic response of laser-impacted droplets is scalable and independent of the propulsion mechanism.

Extreme Ultraviolet (EUV) optical components used in EUV lithography tools are continuously impacted by an exotic and highly transient type of plasma: EUV-induced plasma. Such an EUV-induced plasma is generated in a repetitive fashion upon sending a pulsed beam of high energy (92 eV) photons through a low-pressure background gas. Although its formation occurs on a time scale of ∼100 ns, it is the plasma's decay dynamics on longer time scales that dictates the fluxes and energy distribution of the produced ions. Therefore, the plasma decay also determines the overall impact on plasma-facing EUV optical components. Enabled by electron density measurements using Microwave Cavity Resonance Spectroscopy at a much higher sensitivity, we clearly show the breakdown of the ambipolar field in an EUV photon-induced plasma below electron densities of ∼2 × 1012 m−3 and the—until now—unidentified transition from ambipolar diffusion-driven decay into a decay regime driven by free diffusion. These results not only further improve the understanding of elementary processes in this type of plasma but also have a significant value for modeling and predicting the stability and lifetime of optical components in EUV lithography.

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We present results from a combined experimental and numerical simulation study of the anisotropy of the expansion of a laser-produced plasma into vacuum. Plasma is generated by nanosecond Nd:YAG laser pulse impact (laser wavelength [Formula: see text]) onto tin microdroplets. Simultaneous measurements of ion kinetic energy distributions at seven angles with respect to the direction of the laser beam reveal strong anisotropic emission characteristics, in close agreement with the predictions of two-dimensional radiation-hydrodynamic simulations. Angle-resolved ion spectral measurements are further shown to provide an accurate prediction of the plasma propulsion of the laser-impacted droplet.

For the microwave cavity resonance spectroscopy based non-destructive beam monitor for ionizing radiation, an addition—which adapts the approach to conditions where only little ionization takes place due to, e.g., small ionization cross sections, low gas pressures, and low photon fluxes—is presented and demonstrated. In this experiment, a magnetic field with a strength of 57 ± 1 mT was used to extend the lifetime of the afterglow of an extreme ultraviolet-induced plasma by a factor of ∼5. Magnetic trapping is expected to be most successful in preventing the decay of ephemeral free electrons created by low-energy photons. Good agreement has been found between the experimental results and the decay rates calculated based on the ambipolar and classical collision diffusion models.

We present the results of the calibration of a channeltron-based electrostatic analyzer operating in time-of-flight mode (ESA-ToF) using tin ions resulting from laser-produced plasma, over a wide range of charge states and energies. Specifically, the channeltron electron multiplier detection efficiency and the spectrometer resolution are calibrated, and count rate effects are characterized. With the obtained overall response function, the ESA-ToF is shown to accurately reproduce charge-integrated measurements separately and simultaneously obtained from a Faraday cup (FC), up to a constant factor the finding of which enables absolute cross-calibration of the ESA-ToF using the FC as an absolute benchmark. Absolute charge-state-resolved ion energy distributions are obtained from ns-pulse Nd:YAG-laser-produced microdroplet tin plasmas in a setting relevant for state-of-the-art extreme ultraviolet nanolithography.