Strongly anisotropic ion emission in the expansion of Nd:YAG-laser-produced plasma

Poirier, Lucas; Hemminga, Diko J.; Lassise, Adam; Assink, Luc; Hoekstra, Ronnie; Sheil, John; Versolato, Oscar

doi:10.1063/5.0129112

Cited by 13 publications

(15 citation statements)

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“…2 We characterize the distribution of highly energetic ions, over kinetic energy and over space, in two joined experimental and numerical studies. 4,5 The simulations based on a single-fluid single-temperature approach are in close agreement with the experimental measurements. They reproduce the experimentally found (i) general shape of the ion energy distributions and (ii) absolute number of ions.…”

Section: Introductionsupporting

confidence: 72%

“…We identify a high-energy peak in the ion energy distributions and attribute it to a high-speed quasi-spherical shell formed at early moments in the expansion dynamics. 4,5 In our work on droplet dynamics, the simulations are validated with experimental measurements of the propulsion speed and initial radial expansion rate of the droplet. Their ratio is a key parameter to be optimized for applications in nanolithography.…”

Section: Introductionmentioning

confidence: 92%

“…The tin droplets dispensed first pass through a horizontal laser sheet used to trigger a Nd:YAG laser system (laser wavelength of 1.064 µm) and the data acquisition. [4][5][6] Plasma is generated by a laser pulse focused on the tin microdroplets, as is schematically shown in Fig. 1(a).…”

Section: Experimental Datamentioning

confidence: 99%

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Tin fluid dynamics driven by laser-produced plasmas relevant to EUV nanolithography

Hemminga

Poirier

Hernández-Rueda

et al. 2023

Optical and EUV Nanolithography XXXVI

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State-of-the-art nanolithography machines employ extreme ultraviolet (EUV) light to pattern nanometer-scale features on silicon wafers for the production of integrated circuits. This radiation is generated in a laserproduced plasma formed on tin microdroplet targets. In this contribution, we give an overview of our recent experimental and theoretical studies on the properties of tin plasmas driven by short-wavelength lasers and the subsequent tin fluid dynamics. First, we will present a comprehensive characterization of the properties of laserproduced tin plasmas driven by lasers with wavelengths in the 1–10 µm range. Second, we present absolutely calibrated, charge-state-resolved measurements of the ion kinetic energy distribution recorded under multiple detection angles. Through extensive radiation-hydrodynamic simulations of the plasma formation, growth and expansion, we demonstrate that a single-fluid approach accurately reproduces the angular dependence of the ion energy distribution. Moreover, we identify the origin of a high-energy peak in the distribution as a high-speed shell generated at early times in the expansion. Finally, we show that the time evolution of the droplet target morphology is entirely determined by the early-time plasma-driven pressure impulse on the droplet.

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Section: Introductionsupporting

confidence: 72%

Section: Introductionmentioning

confidence: 92%

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Tin fluid dynamics driven by laser-produced plasmas relevant to EUV nanolithography

Hemminga

Poirier

Hernández-Rueda

et al. 2023

Optical and EUV Nanolithography XXXVI

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“…High-energy ions in the plasma expansion would contaminate the optics. Understanding the plasma expansion dynamics would be beneficial for optimizing debris mitigation techniques [13][14][15] . In addition, plasma expansion also affects the droplet's deformation, which has not been sufficiently understood.…”

Section: Zhenyu Zhao * and Weizhong LImentioning

confidence: 99%

Numerical simulation of laser-produced plasma expansion on a droplet surface

Zhao

Li²

2023

Sci Rep

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In this study, a numerical model of the plasma expansion on a droplet surface based on the initial plasma method was proposed. The initial plasma was obtained through the pressure inlet boundary condition, and the effect of ambient pressure on the initial plasma and adiabatic expansion of the plasma on the droplet surface, including the effect on the velocity and temperature distribution, were investigated. The simulation results showed that the ambient pressure decreased, leading to an increase in the expansion rate and temperature, and therefore a larger plasma size was formed. Plasma expansion creates a backward driving force and eventually envelops the entire droplet, indicating a significant difference compared to planar targets.

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“…9,10 The breakdown process is independent of the type and state of the target, so the LIBS technique can be widely used to analyze solids, liquids, and gases. [11][12][13][14] The LIBS signal is highly responsive and robust enough to overcome many optical interferences, even in sooty ames, which is of particular interest in rapidly changing turbulent ames. 15 These advantages mean that LIBS should also be further developed and applied in temperature measurement.…”

Section: Introductionmentioning

confidence: 99%