The phase composition of aluminium films after bombardment with boron, carbon, nitrogen, phosphorus, and arsenic ions is investigated by the electron‐diffraction method. It is shown that in all the cases except of bombardment with B+ ions the known compounds of aluminium with the indicated species are formed. The phase formed as a result of B+ bombardment could not be identified with the known aluminiumborides. It is shown that the texture of the formed phases is determined by the texture of the initial aluminium films indicating the epitaxial (or endotaxial) character of growth of these phases. In some cases AIP and AlAs phases are formed in an amorphous state. This is explained by insufficient substrate temperature for the crystallization or by amorphization under ion beam action. It is further shown that at bombardment of α‐iron films with C+ ions ϵ‐carbide is formed which after annealing at T ≧ 300 °C transforms into cementite.
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