The concept of using cobalt disilicide as a self-aligned metallization scheme for gate/interconnection and contact formation is gaining wide acceptance. The silicide formation on the gate will require a Co-metal film interaction with the underlying polysilicon that may be doped heavily. We have investigated the silicide formation kinetics during this reaction. The effect of different dopants (B,P, and As) and their concentration on the Co-Si interaction and the dopant redistribution during such reactions were investigated. The results from these studies will be presented and discussed.
In the present work, fly ash-based advanced phosphatic geopolymers were synthesized through a greener route by mechanochemical cogrinding of raw materials. This results in the formation of a solid precursor, which is converted into the advanced geopolymer by adding water alone, thus eliminating the hazards associated with alkali handling along with waste reduction. The precursor and advanced geopolymer were characterized by X-ray diffraction (XRD), Fourier transform infrared (FTIR) spectroscopy and scanning electron microscopy (SEM). Solid-state chemical transformations occurred during mechanochemical cogrinding of the raw materials as evident from the in situ formation of novel phases containing calcium and phosphate ions in the XRD of the advanced phosphatic geopolymer precursor. FTIR studies confirmed the SN1 mechanism during mechanochemical cogrinding of the raw materials. The SEM microstructures revealed improved gelation with substantial reduction in particle size. The advanced phosphatic geopolymers exhibit improved mechanical properties in terms of compressive strength, which is found to be up to 34·7 MPa. The results show that the developed material can be optimized to be well suited for making cement, bricks and paver blocks.
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