urpose ofthis study is to perform a compaction romagnetic powder for optimizing magnetic ng magnetic recording medium or a permanent et. The magnetic powder is treated . A circular disk and an elliptical disk are employed as particle models. To simulate the behavior of the particles, a particle dynamics simulation is proposed, where Coulomb's law for magnetized particles, applied magnetic field, elastic repulsive force ian contact and friction force are considered. ip between the direction of the applied magnetic tion of the punch is examined. It is commonly con §~dered that easy directions of magnetiztion are oriented constantly in the direction of an applied magnetic field. However, the simulate^ results show that the particles are not aligned SO because of the interaction forces between the ~a~n e t~~e d particles.
In this paper, we demonstrate a new method of improving the defect controllability of grainy metal layers, for example, Hot-Al-Cu wiring, by enhancing the practical sensitivity of in-line inspectors. The problem in increasing practical sensitivity is the nuisance counts caused by grain boundaries, which do not cause electrical failures.We propose a method of decreasing the signal from the grain boundaries. On the grayscale images taken by pattern matching inspectors, grain boundaries are observed as gray on Hot-Al-Cu wiring, which is observed as white. If the illumination brightness is increased, the gray level of the grain boundaries becomes higher and saturates at the upper limit of grayscale, i.e., white. On the other hand, the gray level of the wiring stays white. Thus the signal, the grayscale difference between the grain boundaires and the wiring, can be decreased to almost zero. We call this phenomenon the "saturation effect."Our experimental results prove that the saturation effect due to illumination brightness optimization successfully cancels the nuisance counts caused by grain boundaries. The practical sensitivity limit is enhanced from 0.8 to 0.4 m. This solution will greatly improve the defect controllability of grainy metal layers.Index Terms-Grayscale, in-line inspection, pattern matching inspector, patterned inspection, semiconductor manufacturing.
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