基于双光子直写的微纳光学器件研究进展

He Minfei, 何敏菲; Zhu Dazhao, 朱大钊; Wang Hongqing, 王洪庆; Yang Zhenyu, 杨振宇; Shen Fanqi, 沈凡琪; Wu Rengmao, 吴仍茂; Kuang Cuifang, 匡翠方; Liu Xu, 刘旭

doi:10.3788/aos231039

光学学报

2023

DOI: 10.3788/aos231039

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基于双光子直写的微纳光学器件研究进展

何敏菲 He Minfei,

朱大钊 Zhu Dazhao,

王洪庆 Wang Hongqing

et al.

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2024

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Cited by 2 publications

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基于导星纳米对准的片上光子引线直写技术

Sun Bowen,

Zhou Guozun,

Yang Zhenyu

et al. 2024

光学学报

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Objective Integrated photonic chip is a key technology that combines laser light sources, modulators, waveguides, detectors, and other photonic devices into a compact, highbandwidth, lowlatency, and energyefficient package. They hold significant importance in fields such as quantum information processing and optical communication and play a crucial role in the next generation of communication systems and data interconnectivity. The twophoton polymerization technology for threedimensional micro and nanofabrication has pushed the resolution of laser direct writing (LDW) beyond

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基于导星纳米对准的片上光子引线直写技术

Sun Bowen,

Zhou Guozun,

Yang Zhenyu

et al. 2024

光学学报

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基于相变薄膜高分辨激光直写光刻研究进展（特邀）

Guo Jialong,

Wei Tao,

Wei Jingsong

et al. 2024

中国激光

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scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

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基于双光子直写的微纳光学器件研究进展

Cited by 2 publications

References 78 publications

基于导星纳米对准的片上光子引线直写技术

基于导星纳米对准的片上光子引线直写技术

基于相变薄膜高分辨激光直写光刻研究进展（特邀）

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