基于导星纳米对准的片上光子引线直写技术

Abstract

Objective Integrated photonic chip is a key technology that combines laser light sources, modulators, waveguides, detectors, and other photonic devices into a compact, highbandwidth, lowlatency, and energyefficient package. They hold significant importance in fields such as quantum information processing and optical communication and play a crucial role in the next generation of communication systems and data interconnectivity. The twophoton polymerization technology for threedimensional micro and nanofabrication has pushed the resolution of laser direct writing (LDW) beyond