ZnO on diamond: SAWs and pseudo-SAWs

Adler, E.L.; Solie, L.P.

doi:10.1109/ultsym.1995.495594

Cited by 20 publications

(6 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Wu and Chen [16] have pointed out that, for dispersive structures, the K 2 calculated values from (2) are underestimated [16]. For instance, Adler and Solie [17], who have studied ZnO/diamond SAW structure, have shown that the coupling coefficient calculated at constant frequency is about four times larger than that calculated at constant wavelength. They believe that the independent variable is the frequency and the better K 2 results are obtained with constant frequency.…”

Section: B Electromechanical Coupling Coefficientmentioning

confidence: 99%

High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond

Elmazria¹,

Mortet²,

Hakiki³

et al. 2003

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

View full text Add to dashboard Cite

High performances surface acoustic wave (SAW) filters based on aluminium nitride (AlN)/diamond layered structure have been fabricated. The C-axis oriented aluminum nitride films with various thicknesses were sputtered on unpolished nucleation side of free-standing polycrystalline chemical vapor deposition (CVD) diamond obtained by silicon substrate etching. Experimental results show that high order modes as well as Rayleigh waves are excited. Experimental results are in good agreement with the theoretical dispersion curves determined by software simulation with Green's function formalism. We demonstrate that high phase velocity first mode wave (so-called Sezawa wave) with high electromechanical coupling coefficient are obtained on AlN/diamond structure. This structure also has a low temperature coefficient of frequency (TCF), and preliminary results suggest that a zero TCF could be expected.

show abstract

Section: B Electromechanical Coupling Coefficientmentioning

confidence: 99%

High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond

Elmazria¹,

Mortet²,

Hakiki³

et al. 2003

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

View full text Add to dashboard Cite

show abstract

“…As for the Leaky mode SAW, there are some reports by calculation which suggests the high velocity of 15 000 m s −1 with K 2 from 0.1% to 1.2% [17,18]. The layered structures with these materials were also examined.…”

Section: 11mentioning

confidence: 99%

Diamond-based surface acoustic wave devices

Nakahata¹,

Fujii²,

Higaki³

et al. 2003

Semicond. Sci. Technol.

View full text Add to dashboard Cite

Research and development have been carried out to apply the CVD diamond film to surface acoustic wave (SAW) devices. Several kinds of layered structures including a diamond layer have been investigated by the calculations and experiments, and it has been found that the diamond SAW has great advantages for the application of high-frequency SAW devices with high SAW velocity, small temperature coefficient and high power durability. Practical SAW devices have been successfully fabricated with ZnO/diamond/Si and SiO 2 /ZnO/diamond/Si structures whose characteristics are superior to those with conventional SAW materials.

show abstract

“…This phenomenon was also observed in the (002)ZnO/diamond structure, as mentioned in some earlier papers. (24,25) The K 2 dispersion curves of the first five Rayleigh-type modes propagating in the four composite structures are shown in Figs. 3-6.…”

Section: Resultsmentioning

confidence: 99%

High-electromechanical-coupling-coefficient and High-velocity Surface Acoustic Wave Materials of ZnO Films on Diamond

Tasi¹,

Wu²

2019

Sensors and Materials

View full text Add to dashboard Cite

Functional coatings are effective for improving the properties of devices. The development of thin-film-based surface acoustic wave (SAW) devices coated with piezoelectric zinc oxide (ZnO) thin films has attracted considerable attention. The orientation and thickness of piezoelectric films will affect the characteristics of SAW devices. In this research, (100) ZnO films were combined with diamond to form new composite SAW substrates. The SAW properties of (100) ZnO films on diamond with four composite structures, namely, interdigital transducer (IDT)/(100)ZnO/diamond, (100)ZnO/IDT/diamond, IDT/(100)ZnO/metal/diamond, and metal/ (100)ZnO/IDT/diamond were systematically analyzed and some excellent SAW properties were observed. In particular, for mode 1 of (100)ZnO/IDT/diamond, a maximum K 2 of 5.85% and a maximum velocity of 8857 m/s were obtained at a minimum film thickness ratio of h/λ = 0.11. Such research results provide a predictable theoretical basis for the further application of such substrates in high-velocity SAW devices.

show abstract

ZnO on diamond: SAWs and pseudo-SAWs

Cited by 20 publications

References 4 publications

High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond

High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond

Diamond-based surface acoustic wave devices

High-electromechanical-coupling-coefficient and High-velocity Surface Acoustic Wave Materials of ZnO Films on Diamond

Contact Info

Product

Resources

About