The effect of hydrogen doping on luminescence properties of ZnO was investigated. Hydrogen was incorporated in the ZnO crystal by irradiation with an inductively coupled plasma (ICP), in particular, the pulse modulated mode operation of ICP, and the luminescence spectra and hydrogen concentration of the resultant samples were analyzed. A hydrogenated region of 20–100 nm was formed at the sample surface by the irradiation and the concentration of hydrogen was 1017–1018 cm−3. Hydrogen doping improved the ultraviolet emission efficiency of all the samples, and the degree of improvement depended on the initial state (impurity concentration) of the original samples. The most significant improvements were recorded for the sample lightly contaminated with Cu, Al, and Li. The correlation between impurity concentration and hydrogen doping effects is discussed from the viewpoint of charge transfer between hydrogen and the other impurities.