High quality semiconducting ternary compound ZnGeP 2 was synthesized by a modified two-temperature technique using high purity elemental zinc, germanium and phosphorus as the starting materials. Transport phenomena of zinc and phosphorus vapors and the major reaction intermediates, taking place in ZnGeP 2 formation, were studied by interrupting the synthesis process using quenching technique as well as by adjusting the temperatures of cold and hot zones. The powder X-ray diffraction analysis showed that the major reaction intermediates were ZnP 2 , Zn 3 P 2 , and GeP, which proportions were changed at the different temperature stages. ZnP 2 was formed in the temperature gradient region and ZnGeP 2 was formed in the hot zone when the temperature of the hot zone was higher than 900 °C. The 520-1040 °C temperature profile was chosen for the ZnGeP 2 synthesis and charge amount per run reached 200 g. The powder X-ray diffraction pattern of the synthesized ZnGeP 2 compound was in agreement with the standard pattern of ZnGeP 2 . These results demonstrated that the synthesized ZnGeP 2 compound was a single phase.