2001
DOI: 10.1039/b103843p
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Cited by 51 publications
(36 citation statements)
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References 14 publications
(13 reference statements)
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“…This value is superior to the results previously found for metal nitride films deposited by CVD, which have included reports of 0.13 for TiN and of 0.12 for VN. [3,5,18,19] A similar merit value has previously been found for TiN, deposited by sputtering, with a value of 0.25. [4] More effective still are layered coatings such as TiO 2 /TiN/TiO 2 (figure of merit = 0.42) [4] and TiO 2 /Ag/TiO 2 (figure of merit = 0.68) [20] also deposited by sputtering.…”
Section: Resultssupporting
confidence: 67%
“…This value is superior to the results previously found for metal nitride films deposited by CVD, which have included reports of 0.13 for TiN and of 0.12 for VN. [3,5,18,19] A similar merit value has previously been found for TiN, deposited by sputtering, with a value of 0.25. [4] More effective still are layered coatings such as TiO 2 /TiN/TiO 2 (figure of merit = 0.42) [4] and TiO 2 /Ag/TiO 2 (figure of merit = 0.68) [20] also deposited by sputtering.…”
Section: Resultssupporting
confidence: 67%
“…The conventional procedures for the synthesis of VN, however, are often plagued by high temperature (>1200 • C) and extremely long reaction time (several hours to even days) caused by slow diffusion rates in solids and usually involve many cumbersome steps [14]. Recently, Parkin and Elwin [15] have reported chemical vapor deposition of VN film from reaction of VCl 4 with NH 3 . Yang et al [16] have successfully synthesized nanocrystalline VN by a reduction-nitridation reaction between VCl 4 , NH 4 Cl and Mg. Chen et al [17] have successfully synthesized nanocrystalline VN by the reaction of VCl 4 and NaNH 2 at room temperature.…”
Section: Introductionmentioning
confidence: 99%
“…Many of these routes have drawbacks in synthetic procedure as well as scale-up into an industrial process due to pre-reaction. [10,11] Furthermore, literature reports about activity are sometimes contradictory. [12] The site of N-doping within the titania is of key importance, and hitherto not fully understood.…”
mentioning
confidence: 99%