An accurate location of the focal position with respect to a solid target is a key task for different applications, for instance, in laser driven plasma acceleration for x-ray generation where minimum required intensities are above
10
14
W
/
c
m
2
. For such practical applications, new approaches for focus location and target delivery techniques are needed to achieve the required intensity, repeatability, and stability. There are different techniques to accomplish the focusing and target positioning task such as interferometry-, microscopy-, astigmatism-, and nonlinear-optics-based techniques, with their respective advantages and limitations. We present improvements of a focusing technique based on an astigmatic method with potential applications where maximum intensity at the target position is necessary. The presented technique demonstrates high accuracy up to 5 µm, below the Rayleigh range, and also its capability to work in rough surfaces targets and tilt tolerance of the target, with respect to the normal of the target surface.