“…Furthermore, in our recent works, we demonstrated Tm and Ce co-doped Ta 2 O 5 (Ta 2 O 5 :Tm, Ce) [8], Er and Ce co-doped Ta 2 O 5 (Ta 2 O 5 :Er, Ce) [9], and Er, Eu, and Ce co-doped Ta 2 O 5 (Ta 2 O 5 :Er, Eu, Ce) [10] thin films prepared using the co-sputtering method. In this work, we fabricated an Er and Yb co-doped Ta 2 O 5 (Ta 2 O 5 :Er, Yb) thin film using radio-frequency (RF) magnetron co-sputtering of Ta 2 O 5 , Er 2 O 3 , and Yb 2 O 3 for the first time, and evaluated its PL property.…”