Fabrication of Erbium and Ytterbium Co-Doped Tantalum-Oxide Thin Films Using Radio-Frequency Co-Sputtering

Miura, Kenichiro; Arai, Yasuhiko; Kano, Kazusa; Hanaizumi, Osamu

doi:10.4236/msa.2015.65039

Cited by 5 publications

(1 citation statement)

References 18 publications

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“…SiO 2 ) [6]. We have so far fabricated various rare-earth (Er [7]- [11], Tm [12] [13], Y [14], Yb [10] [15]. Such Ta 2 O 5 -based thin films seem to be used as high-refractive-index and light-emitting materials of "autocloning" photonic crystals that can be applied to novel light-emission devices [1], and they also seem to be used as multi-functional coating films having both anti-reflection [3] and downconversion [16]- [18] effects for realizing high-efficiency silicon solar cells.…”

Section: Introductionmentioning

confidence: 99%

Observation of Blue-Light Emission Band from Eu-Doped Ta2O5 Thin Films Prepared Using Co-Sputtering

Miura¹,

Arai²,

Hanaizumi³

2015

MSA

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In this paper, we report on the first observation of blue-light emission bands from europiumdoped tantalum pentoxide (Ta 2 O 5 :Eu) thin films prepared using a simple co-sputtering method. We prepared four specimens from one as-deposited sample, and we subsequently annealed them at 700˚C, 800˚C, 900˚C, or 1000˚C for 20 min. Four remarkable photoluminescence (PL) peaks at wavelengths of 600, 620, 650, and 700 nm due to the 5

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Section: Introductionmentioning

confidence: 99%

Observation of Blue-Light Emission Band from Eu-Doped Ta2O5 Thin Films Prepared Using Co-Sputtering

Miura¹,

Arai²,

Hanaizumi³

2015

MSA

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Observation of Violet-Light Emission Band for Thulium-Doped Tantalum-Oxide Films Produced by Co-Sputtering

Miura

Suzuki²,

Hanaizumi³

2015

MSA

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We prepared thulium-doped tantalum (V) oxide (Ta 2 O 5 :Tm) thin films using co-sputtering of two Tm 2 O 3 pellets and a Ta 2 O 5 disc, and we observed photoluminescence (PL) peaks not only around a wavelength of 800 nm due to the 3 H 4 → 3 H 6 transition of Tm 3+ but also around a wavelength of 400 nm (violet) from the films after annealing for the first time. Comparatively narrow PL peaks around the wavelength of 400 nm were observed from the films annealed at 800˚C and 900˚C for 20 min. The peak intensity from the film annealed at 900˚C was approximately four-times stronger than that from the film annealed at 800˚C. The origin of the 400-nm peaks seems to be the same as our non-doped Ta 2 O 5 thin films deposited using radio-frequency sputtering because we observe PL peaks around 400-430 nm from the Ta 2 O 5 films. Such a Ta 2 O 5 :Tm co-sputtered thin film seems to be used as a multi-functional coating film having both anti-reflection and down-conversion effects for realizing a high-efficiency silicon solar cell.

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Preparation of CuO-Ta2O5 Composites Using a Simple Co-Sputtering Method

Miura¹,

Osawa²,

Yokota³

et al. 2015

MSCE

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We prepared CuO-Ta2O5 composite films using our simple co-sputtering method for the first time. Four specimens were prepared from an as-deposited CuO-Ta2O5 sample by cutting it using a diamond-wire saw, and the specimens were subsequently annealed at 600˚C-900˚C. The X-ray diffraction and photoluminescence (PL) of the annealed specimens were evaluated. The CuO-Ta2O5 film annealed at 600˚C seemed to be primarily amorphous phase, and a sharp PL peak at a wavelength of 450 nm, due to the existence of Cu 2+ , was observed from the film. In contrast, the CuO-Ta2O5 films annealed at 700˚C, 800˚C, and 900˚C seemed to be tetragonal CuTa2O6 phases. We expect that good-quality CuTa2O6 films can be obtained using our very simple co-sputtering method and subsequent annealing above 900˚C. Such CuTa2O6 films can be used in chemisorptions conductometric gas sensors.

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Fabrication of Erbium and Ytterbium Co-Doped Tantalum-Oxide Thin Films Using Radio-Frequency Co-Sputtering

Cited by 5 publications

References 18 publications

Observation of Blue-Light Emission Band from Eu-Doped Ta<sub>2</sub>O<sub>5 </sub>Thin Films Prepared Using Co-Sputtering

Observation of Blue-Light Emission Band from Eu-Doped Ta<sub>2</sub>O<sub>5 </sub>Thin Films Prepared Using Co-Sputtering

Observation of Violet-Light Emission Band for Thulium-Doped Tantalum-Oxide Films Produced by Co-Sputtering

Preparation of CuO-Ta<SUB>2</SUB>O<SUB>5</SUB> Composites Using a Simple Co-Sputtering Method

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Fabrication of Erbium and Ytterbium Co-Doped Tantalum-Oxide Thin Films Using Radio-Frequency Co-Sputtering

Cited by 5 publications

References 18 publications

Observation of Blue-Light Emission Band from Eu-Doped Ta&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;5 &lt;/sub&gt;Thin Films Prepared Using Co-Sputtering

Observation of Blue-Light Emission Band from Eu-Doped Ta&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;5 &lt;/sub&gt;Thin Films Prepared Using Co-Sputtering

Observation of Violet-Light Emission Band for Thulium-Doped Tantalum-Oxide Films Produced by Co-Sputtering

Preparation of CuO-Ta&lt;SUB&gt;2&lt;/SUB&gt;O&lt;SUB&gt;5&lt;/SUB&gt; Composites Using a Simple Co-Sputtering Method

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Observation of Blue-Light Emission Band from Eu-Doped Ta<sub>2</sub>O<sub>5 </sub>Thin Films Prepared Using Co-Sputtering

Observation of Blue-Light Emission Band from Eu-Doped Ta<sub>2</sub>O<sub>5 </sub>Thin Films Prepared Using Co-Sputtering

Preparation of CuO-Ta<SUB>2</SUB>O<SUB>5</SUB> Composites Using a Simple Co-Sputtering Method