2015
DOI: 10.1002/pssc.201400108
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XPS study of MoO3 and WO3 oxide surface modification by low‐energy Ar+ ion bombardment

Abstract: The surface modification of oxides MoO3and WO3 under irradiation by Ar+ ions with an energy of 3 keV in high vacuum is investigated by X‐ray photoelectron spectroscopy. It is shown that under irradiation by Ar+ ions lower and intermediate oxides and unoxidized metals are formed in the surface layers of higher oxides. It is found that the process of ion‐beam reduction of the surface of oxides MoO3and WO3 substantially depends on the irradiation dose and difference in energy of the metal–oxygen bond in oxides. (… Show more

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Cited by 47 publications
(30 citation statements)
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“…The survey spectra of intermediate product show the presence of O, Cl, and Mo elements (Figure S3, Supporting Information). The high‐resolution Mo 3d XPS spectra is presented in Figure c; the two peaks at 235.0 and 231.8 eV correspond to the Mo–O bond, whereas the two peaks at 234.3 and 231.2 eV are assigned to the Mo–Cl bond, which is in good agreement with previous report . The peaks of Cl 2p are divided into 200.4 and 198.8 eV, corresponding to 2p 1/2 and 2p 3/2 , respectively (Figure d), which could be attributed to the bonding to metal .…”
Section: Resultssupporting
confidence: 90%
“…The survey spectra of intermediate product show the presence of O, Cl, and Mo elements (Figure S3, Supporting Information). The high‐resolution Mo 3d XPS spectra is presented in Figure c; the two peaks at 235.0 and 231.8 eV correspond to the Mo–O bond, whereas the two peaks at 234.3 and 231.2 eV are assigned to the Mo–Cl bond, which is in good agreement with previous report . The peaks of Cl 2p are divided into 200.4 and 198.8 eV, corresponding to 2p 1/2 and 2p 3/2 , respectively (Figure d), which could be attributed to the bonding to metal .…”
Section: Resultssupporting
confidence: 90%
“…Meanwhile, the high‐resolution Mo 3d of pure MoO 3 (Figure S6, Supporting Information) deconvolutes similar four peaks at the corresponding binding energy. The presence of Mo 4+ in pure MoO 3 is due to the reduction of MoO 3 with cracked carbon under X‐ray irradiation . The formation of MoO 2 in MoO x /NCNTs(23) is confirmed with the larger peak areas of Mo 4+ , as compared to pure MoO 3 .…”
Section: Resultsmentioning
confidence: 86%
“…The presence of Mo 4+ in pure MoO 3 is due to the reduction of MoO 3 with cracked carbon under X-ray irradiation. [39] The formation of MoO 2 in MoO x /NCNTs(23) is confirmed with the larger peak areas of Mo 4+ , as compared to pure MoO 3 . Figure 2h shows further analysis of high-resolution C 1s.…”
Section: Morphological and Structural Features Of Moo X /Ncntsmentioning
confidence: 82%
“…Потеря кислорода приводит к образованию на поверхности фазы с меньшей степенью окисления, а в некоторых случаях -к появлению восстановленной металлической фазы. В результате на поверхности ок-сида формируется тонкий (до 2.5 nm) измененный слой, по составу отличный от стехиометрического исходного диэлектрика [15,16].…”
Section: Introductionunclassified
“…При небольших дозах облучения, не превышаю-щих 10 16 cm −2 , в процессе распыления под действием ионной бомбардировки возникают поверхностные неод-нородности атомного масштаба. При больших дозах наблюдаются микроскопические неоднородности с раз-мерами порядка 10−1000 nm, образуются ямки травле-ния, конические или пирамидальные выступы, а также волнистые структуры типа " ряби" [14].…”
Section: Introductionunclassified