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2013
DOI: 10.1002/sia.5311
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XPS and AFM characterization of aminosilanes with different numbers of bonding sites on a silicon wafer

Abstract: The aim of this work was the preparation and characterization of a silicon surface modified by different self‐assembled aminopropylsilanes with the purpose of using them in sensor applications. Single‐crystal silicon wafers (111) were modified with aminosilanes that have different numbers of bonding sites: 3‐aminopropyltrimethoxysilane (APTMS), 3‐aminopropyldiethoxymethylsilane (APRDMS) and 3‐aminopropylethoxydimethylsilane (APREMS). We deposited the self‐assembled layers from a solution of aminosilanes in tol… Show more

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Cited by 73 publications
(65 citation statements)
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“…The C-N and C-Si bonds prove the inclusion of aminopropyl substituents in the silicon oxide matrix. According to the published data, the peaks at 399.5 eV and 401.6 eV in spectrum of N 1s canattributed to C-N and N-H bonds, that correlates with the IR-spectroscopy data[43,44].…”
supporting
confidence: 69%
See 1 more Smart Citation
“…The C-N and C-Si bonds prove the inclusion of aminopropyl substituents in the silicon oxide matrix. According to the published data, the peaks at 399.5 eV and 401.6 eV in spectrum of N 1s canattributed to C-N and N-H bonds, that correlates with the IR-spectroscopy data[43,44].…”
supporting
confidence: 69%
“…The surface chemical composition of silica supports determined by X-ray photoelectron spectroscopy. High resolution XPS spectra of C 1s (Figure 3 The bonds -C-ONa is belong to molecules of sodium carbonate (Figure 3) [43,44].…”
Section: Xps Of Catalysts Before the Reactionmentioning
confidence: 99%
“…However, N 1s spectra appeared in the APTMS-treated highly porous low-k dielectric, confirming the formation of a highly oriented SAMs from APTMS. Deconvoluting N 1s peak can result in two peaks at binding energies of 399.3 eV and 401.2 eV, attributed to primary (-NH 2 ) and protonated (-NH 3 + ) amino groups, respectively [30,31]. Moreover, the higher the percentage of -NH 2 groups (~82%) implies that the formation SAMs are highly oriented [31].…”
Section: Resultsmentioning
confidence: 99%
“…According to the published data [43,44], the peaks at 399.5 and 401.6 eV in the spectrum of N 1s can be attributed to C-N and N-H bonds that correlate with the IR-spectroscopy data ( Figure 2) [43,44]. The bonds -C-ONa belong to molecules of sodium carbonate ( Figure 3) [43,44]. Figure 3d shows the model decomposition of the XPS high-resolution spectra of Pd 3d energy core-level of 5% wt.…”
Section: Xps Of Catalysts Before the Reactionmentioning
confidence: 99%