A combined analysis, based on angle-resolved X-ray photoelectron spectroscopy and multiple-internalreflection infrared spectroscopy, of the (1 0 0) silicon surface after etching in dilute aqueous solution of HF is presented. The analysis shows that the surface is mainly formed by a heterogeneous distribution of SiH, SiH 2 and SiH 3 terminations, but contains (in addition to sub-stoichiometric oxidized silicon) a form of reduced silicon, not consistent with the currently accepted picture of the native HF aq -etched surface.