Xenon tetrafluoride as a decomposition agent for silicone rubber for isolation and atomic emission spectrometric determination of trace metals

Rigin, V.I.; Skvortsov, Nikolaj K.; Rigin, Vassili V.

doi:10.1016/s0003-2670(96)00563-6

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2001

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“…[9][10][11] As for the siloxane series, there were several reports of analyses of both total silicon amounts 12 and trace metallic impurities. Rigin et al 13 reported that the use of xenon tetrafluoride as a decomposition agent for silicone rubber was successfully applied in atomic emission spectrometry. However, these methods were for mg g 21 levels, not the ng g 21 levels required by current semiconductor processes.…”

Section: Introductionmentioning

confidence: 99%