2008
DOI: 10.1088/0957-4484/19/44/445501
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X-ray pushing of a mechanical microswing

Abstract: Nanoelectromechanical Systems (NEMS) are among the best candidates to measure interactions at nanoscale [1,2,3,4,5,6], especially when resonating oscillators are used with high quality factor [7,8]. Despite many efforts [9,10], efficient and easy actuation in NEMS remains an issue [11]. The mechanism that we propose, thermally mediated Center Of Mass (COM) displacements, represents a new actuation scheme for NEMS and MEMS. To demonstrate this scheme efficiency we show how mechanical nanodisplacements of a MEMS… Show more

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Cited by 2 publications
(3 citation statements)
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“…4). This asymmetry reflects that of the force exerted by the electron beam and is a signature of thermally-induced bending at the nanoscale [43,44].…”
mentioning
confidence: 84%
“…4). This asymmetry reflects that of the force exerted by the electron beam and is a signature of thermally-induced bending at the nanoscale [43,44].…”
mentioning
confidence: 84%
“…The interactions between x-ray techniques and MEMS technology have been recently shown in work where a modulated x-ray beam has been used to excite a mechanical system around its first-order resonance [15]. At variance we show here how the inverse mechanism can be used to modulate an x-ray beam.…”
mentioning
confidence: 70%
“…The cantilever displacement is measured by the interference between the light reflected from the end of a cleaved optic fiber and the beam reflected by the back of the lever. This interferometric technique has been shown to lead to sub-ångström precision in position measurement [15][16][17][18].…”
mentioning
confidence: 99%