2013
DOI: 10.1007/s00339-013-7560-3
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X-ray properties and interface study of B4C/Mo and B4C/Mo2C periodic multilayers

Abstract: International audienceWe present a comparative study of B4C/Mo and B4C/Mo2C periodic multilayer structures deposited by magnetron sputtering. The characterization was performed by grazing incidence X-ray reflectometry at two different energies and high resolution transmission electron microscopy. The experimental results indicate the existence of an interdiffusion layer at the B4C-on-Mo interface in the B4C/Mo system. Thus, the B4C/Mo multilayers were modeled by an asymmetric structure with three layers in eac… Show more

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Cited by 11 publications
(9 citation statements)
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“…The monochromator is equipped with two plane gratings, Gra and Grb, which are respectively a variable groove depth (VGD) 19 grating with 1600 lines/mm, and a Mo 2 C/B 4 C alternate multilayer (AML) grating with 2400 lines/mm. [20][21][22] The VGD grating is optimized for the energy range 240-1500 eV while the AML grating is optimized for the energy domain 1000-2500 eV. The efficiency of both gratings is detailed in Sec.…”
Section: Plane Grating Monochromator (Pgm)mentioning
confidence: 99%
“…The monochromator is equipped with two plane gratings, Gra and Grb, which are respectively a variable groove depth (VGD) 19 grating with 1600 lines/mm, and a Mo 2 C/B 4 C alternate multilayer (AML) grating with 2400 lines/mm. [20][21][22] The VGD grating is optimized for the energy range 240-1500 eV while the AML grating is optimized for the energy domain 1000-2500 eV. The efficiency of both gratings is detailed in Sec.…”
Section: Plane Grating Monochromator (Pgm)mentioning
confidence: 99%
“…For higher energy, the VLS-VGD gratings are no longer efficient. In this high-energy range, a newly developed multilayer grating (Lagarde et al, 2013b;Choueikani et al, 2013) is used to cover the 1 keV to 2.5 keV photon energy range efficiently.…”
Section: Monochromatormentioning
confidence: 99%
“…That is to say, the Mo 2 C compound shows small possibility of phase separation. Moreover the thermal stability of Mo 2 C has been already demonstrated [16,46]. Regarding the results mentioned above, we infer that there is a possibility of excess C atoms existing in the multilayer.…”
Section: Discussionmentioning
confidence: 62%