X-ray microscopy

Лидер, В. В.

doi:10.3367/ufnr.2016.06.037830

Cited by 4 publications

(8 citation statements)

References 249 publications

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“…In addition, for a given wavelength and experiment geometry, the measured phase shifts should not be too large that is an ideal for observation object must not be too thickthe first of the relations (7). Otherwise, if the reverse condition 2πδL/λ >> 1 is satisfied, the measurement result will be ambiguous or utterly dependent on the sample tilt and jitter, beam angular characteristics, experiment layout, radiation monochromaticity degree etc.…”

Section: When An Object In X-ray Optics Can Be Considered As Phase Scmentioning

confidence: 99%

“…As in the hard X-ray phase contrast microscopy of greatest interest for the researcher are transparent three-dimensional objects with characteristic linear dimensions of the order of 10-0.1 microns [7], high requirements are made to the performance of modern X-ray microscopes. This applies above all to the spatial resolution of the device, which should be at several tens of nanometers level over the entire field of view, with the absence of noticeable chromatic aberration.…”

Section: Test Objects In X-ray Microscopymentioning

confidence: 99%

“…Recently phase contrast method got further development in X-ray microscopy [7]. Study of low-contrast biological objects at the cellular level, problem of testing microelectronic and nanotechnology products has become an impetus for development and improvement of optical schemes working on the principle of X-ray phase contrast microscope.…”

Section: Introductionmentioning

confidence: 99%

“…Successes in this branch of experimental physics were achieved in recent years thanks, to a large extent, to the emergence of powerful X-ray sources and progress in focusing X-ray optics. Details are considered in the review [7]. Note that the estimated spatial resolution of X-ray microscopy lies between optical and electron microscopy.…”

Section: Introductionmentioning

confidence: 99%

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Track membranes and their replicas as high-frequency phase-contrast objects in X-ray optics

Mitrofanov¹,

Попов²,

Prokopovich³

2020

RENSIT

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Contents 1. IntroduCtIon (174) 2. When an objeCt In X-ray optICs Can be ConsIdered as phase sCreen? (175) 3. test objeCts In X-ray mICrosCopy (176) 4. Wave fIeld CalCulatIon In the fIlm WIth a sIngle pore (178) 5. phase varIatIons near nanopore In a traCk membrane (179) 6. phase veloCIty of Waves propagatIng along the aXIs of CylIndrICal nanoholes (183) 7. Track membranes as X-ray diffuser − fIlter for speCkle suppressIon (183) 8. ConversIon of phase Contrast to amplItude (184) 9. InorganIC traCk membranes and theIr replICas as phase test objeCts (185) 10. ConClusIon (187) referenCes (188)

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Section: When An Object In X-ray Optics Can Be Considered As Phase Scmentioning

confidence: 99%

Section: Test Objects In X-ray Microscopymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Track membranes and their replicas as high-frequency phase-contrast objects in X-ray optics

Mitrofanov¹,

Попов²,

Prokopovich³

2020

RENSIT

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“…также обзорную статью [7]). Современный уровень рентгеновской микроскопии и, в частности, фазово-контрастной рентгеновской микроскопии в жесткой рентгеновской области спектра представлен в публикациях [8,5]. Данные сетевого ресурса [5] были обновлены А.А.…”

Section: Introductionunclassified

Трековая Мембрана Как Фазовый Тест-Объект Для Рентгеновской Области Спектра

Митрофанов¹,

Попов²,

Прокопович³

2020

Журнал Технической Физики

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Рассмотрена задача о прохождении плоской волны рентгеновского излучения через однородную полимерную пленку со сквозным отверстием субмикронного радиуса --- участка стандартной трековой мембраны с цилиндрическими порами. Для оценки интенсивности проходящей волны использовано скалярное параболическое уравнение Леонтовича-Фока. Его численным решением получены пространственное распределение амплитуды поля и возмущение волнового фронта в окрестности поры и за ее пределами на длине волны 0.154 nm в зависимости от размеров наноотверстия и толщины пленки. Показано, что трековая мембрана, а также ее неорганическая реплика могут служить высококонтрастным прецизионным тест-объектом для изучения характеристик фазово-контрастного рентгеновского микроскопа и схем восстановления изображения. Ключевые слова: рентгеновская оптика, фазово-контрастная рентгеновская микроскопия, фазовые тестовые нанообъекты, трековые мембраны, метод параболического уравнения в рентгеновской оптике.

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A dielectric Kinoform zone plate with 15 nm resolution and high efficiency for soft X-ray optics

Tong

Chen

et al. 2022

Preprint

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X-ray microscope as an important nanoprobing tool is expected to play a powerful role in nano-inspections of materials. Despite the fast advances of high resolution focusing/imaging reported, the diffraction efficiency of existing binary zone plates as the lenses in the microscope is mostly around 5% in practice and rapidly goes down to 1-2% when the resolution approaches 10 nm, failing its applications in advanced scientific research. Zone plates with Kinoform profile are supposed to be high efficient, little progress for achieving both high resolution and high efficiency has been reported. The conflict between the resolution and the efficiency in X ray optics has become a long-lasting bottleneck in the further development of X-ray microscope. Based on our earlier success in developing high efficiency Kinoform zone plates by greyscale electron beam lithography, we proposed, in this work, a new zone plate structure by combing a dielectric Kinoform zone plate with an atomic layer deposited HfO2 zone plate to achieve high resolution focusing/imaging with high efficiency. Beam propagation method was applied in designing and optimizing Kinoform shapes of the zones, greyscale and/or binary electron beam lithography was carried out for generating both 3D Kinoform as well as rectangular zones with aspect ratio of 23/1 in dielectric resist, and finally high-quality atomic layer deposition of HfO2 was conducted to form the 15-nm wide outermost zone. Optical characterizations by an in-house developed soft X ray microscope demonstrated 15-nm resolution focusing/imaging with over 7% efficiency, which is the highest with such a resolution as far as our awareness. The origin of such an improvement behind the proposed novel lenses is interpreted by our BMP calculation results and the comparisons with existing performances by other reports in literature was discussed.

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X-ray microscopy

Cited by 4 publications

References 249 publications

Track membranes and their replicas as high-frequency phase-contrast objects in X-ray optics

Track membranes and their replicas as high-frequency phase-contrast objects in X-ray optics

Трековая Мембрана Как Фазовый Тест-Объект Для Рентгеновской Области Спектра

A dielectric Kinoform zone plate with 15 nm resolution and high efficiency for soft X-ray optics

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