“…X-ray diffractometry (XRD) is widely used for characterization of epitaxial layers and superlattices (SL) consisting of thin quantum wells (QWs) separated by barriers. Heterostructures on the basis of III-V (AlAs/GaAs, InAs/GaAs, InGaAs/InP etc) [1][2][3][4][5] and II-VI (ZnSe/ZnMgSe, CdSe/ZnSe) [6,7] compounds, as well as recently of III-nitrides [8][9][10] are among the objects investigated by high resolution XRD. XRD studies permit one to obtain such parameters of SLs as thickness, composition and strain of individual sublayers.…”