Writing nanometer-scale pits in sputtered carbon films using the scanning tunneling microscope

Abstract

Nanolithography of metal films using scanning force microscope patterned carbon masks

Parallel nanolithography in carbon layers with conductive imprint stamps

“…The examples discussed in this work demonstrate the transfer of complex 3D-shaped patterns with lateral line and dot widths well below 100 nm. According to previous publications, [3][4][5] this is probably not the lower limit for the structure size achievable. Future experiments will explore the potential of this lithographic method for wide-area patterning for technological purposes.…”

“…4 Recently, Eagle and Fedder reported writing nanoscale pits in a-C layers using the scanning tunneling microscope ͑STM͒. 5 For a technological applicability of this technique, however, the slow writing speed is a serious obstacle.…”

“…In contrast to our previous SFM lithography experiments, 3 we found a lower threshold voltage for the onset of carbon oxidation between 3.9 and 4 V, in agreement with other STM experiments. 5 In order to investigate the influence of the stamp geometry on the pattern transfer, we additionally produced a stamp with wire-shaped structures of similar dimensions, which is shown in Fig. 3.…”

Probe Storage

“…So it remains to check that in the limit N → ∞, P(p | r) becomes a delta function supported at (3.16). The calculation is based on the application of Central Limit Theorem [41,Chapter 2] and is fairly long. Here we only present the final answer:…”

High performance asymmetric supercapacitors with ultrahigh energy density based on hierarchical carbon nanotubes@NiO core–shell nanosheets and defect-introduced graphene sheets with hole structure

“…Most of the patterning strategies employed, such as electro plasma etching, post-activation processes and lithography, oen involve high temperature processing and dangerous gases, which are not cost efficient or suitable for large scale preparation. [44][45][46][47] Carbon gasication, catalyzed by metallic and oxide particles in a controlled atmosphere, has been demonstrated to be a facile and efficient method. 48 Based on their highly uniform porosity compared to many other porous carbon materials, DGNs exhibit enhanced electrochemical performance and high-rate capability in asymmetric supercapacitor applications.…”