Parallel nanolithography in carbon layers with conductive imprint stamps

Mühl, Thomas; Kretz, Johannes; Mönch, Ingolf; Schneider, Claus M.; Brückl, Hubert; Reiss, Günter

doi:10.1063/1.125895

Cited by 36 publications

(22 citation statements)

References 9 publications

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“…This technique has been extensively used for investigating the conductance distribution on metal surfaces, insulator-conductor hetero-structures and granular metal-insulator nano-composites [20,21]. At low bias voltage, CAFM can resolve the spatial fluctuations of the local current through the barrier, and thus reveal defective sites or imperfections whereas, for a bias voltage above 1 V, a local oxidation used for nanolithography was reported [22].…”

Section: Introductionmentioning

confidence: 99%

Study of MgO tunnel barriers with conducting atomic force microscopy

Bhutta¹,

Schmalhorst²,

Reiss³

2009

Journal of Magnetism and Magnetic Materials

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Section: Introductionmentioning

confidence: 99%

Study of MgO tunnel barriers with conducting atomic force microscopy

Bhutta¹,

Schmalhorst²,

Reiss³

2009

Journal of Magnetism and Magnetic Materials

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“…One undoubted advantage of SPMassisted LAO is the possibility of studying the resulting structures in situ. For commercial applications of LAO, conductive dies with patterned faces can be used as cathodes to increase the structuring rate by a few orders of magnitude (e.g., [8,9]). …”

Section: Introductionmentioning

confidence: 99%

SPM probe-assisted surface nanostructuring of boron-doped diamond

et al. 2016

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Surface modification of conductive boron-doped diamond has been conducted using the electrical field of the probe of a scanning probe microscope (SPM) at varying relative humidity (RH) of the ambient environment. It has been found that, under the action of positive polarity pulses applied to the sample via a grounded SPM probe, the sample material undergoes modification. The modification pattern depends on atmospheric RH: low (up to 32%) and high humidity values (above 35%) lead to the formation of cavities and protrusions, respectively. It has been found that the resulting protrusions exhibit temporary instability; that is, a protrusion is partially transformed into an array of nanoobjects. The mechanism of modification of boron-doped diamond-local anodic oxidation-has been discussed.

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“…While the common element is exploitation of the localized interaction between a sharp tip and a surface for the purpose of carrying out spatially-resolved manipulation of surface structures and/or properties, a large sub-group is based on application of a tip-to-surface bias, with the tip being effectively a travelling electrode. For instance, oxide structures with line-width resolution better than 10 nm can be written by an SPM probe to a silicon surface or certain metallic substrates by 'anodic' oxidation [1][2][3][4] ; the local ferroelectric structure 5 can be manipulated by 'electrostatic' force microscopy; and oxidative nano-lithographic patterning of amorphous graphitic carbon films and of electrically conducting diamond-like carbon (DLC) films has been described [6][7][8][9][10] .…”

Section: Introductionmentioning

confidence: 99%

Tip-induced nanoscale manipulation of Si and DLC surfaces: the state of the tip

Myhra

Watson

2005

SPIE Proceedings

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Oxidative nano-writing by a conducting AFM tip to Si substrates has so far been ascribed to an anodic electrochemical process. However, there is evidence that thermal effects may play a role. More recently it has been demonstrated that conducting diamond-like carbon (DLC) films can be nano-machined by a biased conducting tip; the process is evidently due to local thermally activated oxidation and formation of CO 2 . Thus the prevailing description in terms of an athermal anodic oxidative mechanism will need to be revisited and possibly revised. The physico-chemical state of the tip is known to affect the rate and efficiency of the process in some unspecified manner. It is plausible to ascribe variations in the I-V characteristics and thermal transport to tip effects that are operational at the point of contact. However, so far the focus has been on the surface, and little attention has been given to a detailed and relevant characterization of the tip and its efficacy as a manipulative probe. Tips were prepared with a range of known initial conditions (i.e. doped Si plus H-termination, Au-coating, or native oxide). I-V characteristics were correlated against oxidative efficiency versus clean H-terminated Si, Si plus native oxide, Si plus 2.5 nm thermal oxide and DLC. The outcomes at positive sample bias can variously be described by ohmic transport, by Fowler-Nordheim, and direct tunnelling. Likewise, tip alteration resulting from oxidative surface manipulation has been monitored by subsequent characterization. The evidence favours a thermal mechanism of oxidation arising from a repetitive, but interrupted, deposition of thermal energy at the tip-tosurface junction, where inelastic tunnelling completes the circuit. Thus there is a narrow temperature window of optimum conditions. The tip will deteriorate irreversibly if the peak temperature is too high, while oxidation of the surface will not take place if the peak temperature is too low.

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Parallel nanolithography in carbon layers with conductive imprint stamps

Abstract: Nanolithography of metal films using scanning force microscope patterned carbon masks

Cited by 36 publications

References 9 publications

Study of MgO tunnel barriers with conducting atomic force microscopy

Study of MgO tunnel barriers with conducting atomic force microscopy

SPM probe-assisted surface nanostructuring of boron-doped diamond

Tip-induced nanoscale manipulation of Si and DLC surfaces: the state of the tip

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