2001
DOI: 10.1016/s0169-4332(01)00347-6
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Work function changes and surface chemistry of oxygen, hydrogen, and carbon on indium tin oxide

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Cited by 54 publications
(33 citation statements)
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“…The peak at bout 285.0 eV corresponds to C 1s, suggesting that carbon is the only major contaminant. Similar results have also been reported by several groups [37][38][39]. Fig.…”
Section: The Effect Of Oxygen Plasma Treatment On the Surface Propertsupporting
confidence: 91%
“…The peak at bout 285.0 eV corresponds to C 1s, suggesting that carbon is the only major contaminant. Similar results have also been reported by several groups [37][38][39]. Fig.…”
Section: The Effect Of Oxygen Plasma Treatment On the Surface Propertsupporting
confidence: 91%
“…For reducing atmospheres either forming gas 10,19,20,22,23,[26][27][28][29][30] or low oxygen partial pressures 1,14,17,26,[31][32][33][34][35][36] are used. Furthermore, plasma treatments [37][38][39] as well as wet-chemical treatments [40][41][42] are ways to influence ITO's surface properties. The compilation in Table I shows the change of conductivity depending on the deposition method and postdeposition treatment.…”
Section: Introductionmentioning
confidence: 99%
“…45 Application-oriented works repeatedly reported the occurrence of metallic indium in different ITO layers. 4,10,[46][47][48] This formation is usually driven by strongly reducing conditions such as plasma-enhanced chemical-vapor deposition ͑PECVD͒, 39,49 ultrahigh vacuum ͑UHV͒, 5,12 and hydrogen gas 38 or acids in wet chemistry. 40,41 But also the neutrondiffraction study of González et al mentioned the occurrence of metallic indium after a reduction with the forming gas.…”
Section: Introductionmentioning
confidence: 99%
“…The surface chemical functionality is not fully accepted: some authors submit the presence of surface hydroxyl [11] others-that concentration of OH is negligible [12], but it is quite evident that cleanliness and chemical state of the surface are critically important for the efficient hole-injection. Many recent reports describe the results of various forms of ITO surface modification including ultra-violet ozone cleaning, argon ion bombardment, oxygen plasma exposure, annealing, exposure by acids and bases, hydrogen peroxide, adsorption of metals with high workfunctions, dielectric oxides, copper phthalocyanine, and various organic compounds [4][5][6][7][8]10,[13][14][15][16][17][18][19]. However, although these treatments have been shown to increase the work-function of ITO and hole efficiency, possible physical decohesion at the hydrophobic HTL-hydrophilic oxide anode interface has frequently been ignored.…”
Section: Introductionmentioning
confidence: 99%