Terahertz perfect absorbers represent
an essential photonic component
for detecting, modulating, and manipulating terahertz radiation. We
utilize single-layer H-shaped all-silicon arrays to demonstrate tunable
ultra-broadband terahertz wave absorption. Experiment and simulation
reveal near unity absorption at 1 THz, with a bandwidth of ∼913
GHz for ≥90% absorbance. The absorption is optically tunable,
exhibiting a resonance frequency blueshift by 420 GHz, while the peak
absorbance remains over 99%. The dynamic response upon optical excitation
depends on the penetration depth of the pump beam in silicon, as demonstrated
through simulations that take into account the depth dependence of
the carrier concentration in the all-silicon metamaterial perfect
absorber. Notably, our all-silicon and ultrabroadband metamaterial
perfect absorber is compatible with CMOS processing, potentially facilitating
the development of terahertz detectors. Furthermore, the demonstrated
tunable response may find potential applications toward creating dynamic
functional terahertz devices, such as modulators and switches.