Optically Modulated Ultra-Broadband All-Silicon Metamaterial Terahertz Absorbers

Zhao, Xiaoguang; Wang, Yue; Schalch, Jacob; Duan, Guangwu; Cremin, Kevin; Zhang, Jingdi; Chen, Chunxu; Averitt, R. D.; Zhang, Xin

doi:10.1021/acsphotonics.8b01644

Cited by 185 publications

(104 citation statements)

References 39 publications

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“…On the other hand, lossy dielectric materials with moderately high relative permittivity are engineered to enhance coupling between and field confinement within subwavelength resonant cavity bodies. Such materials can also be designed to confined fields and subsequently dissipate in resonators for broadband terahertz absorbers …”

Section: Dielectric Materials As Resonant Elements and Structuresmentioning

confidence: 99%

“…Such materials can be engineered in an array configuration to modulate the transmission and reflection amplitude, phase or polarization of an incident terahertz wave, or actively switch resonant frequency. In this category, moderately doped silicon, compound III–V semiconductors, 2D materials and van der Waal heterostructures, III–V semiconductor and carbon nanotubes and nanowires, and oxide nanospheres have been demonstrated to exhibit active response in the terahertz regime.…”

Section: Lossless Dielectric Materialsmentioning

confidence: 99%

Section: Lossless Dielectric Materialsmentioning

confidence: 99%

“…An ideal or properly regulated etching process does not or only partially erodes the passivation layer deposited on the walls, resulting in perfect vertical etched profile. A wide range of dielectric‐based resonators composed of Si resonators have been realized for different applications using the Bosch DRIE process that employs fluorine‐based chemistry . Chlorine‐based chemistry, such as Cl 2 and BCl 3 , is employed to etch III–V compound materials based on the nonreactivity of fluorine to indium‐based compounds and the high mass transfer rate required for the removal of indium‐based by‐products …”

Section: Lossless Dielectric Materialsmentioning

confidence: 99%

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Dielectrics for Terahertz Metasurfaces: Material Selection and Fabrication Techniques

Ako

Upadhyay

Withayachumnankul

et al. 2019

Advanced Optical Materials

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on distinctive spectral signatures resulting from vibrational modes of covalent and hydrogen bonds. [8,[13][14][15][16] The focus on this spectrally rich region is attributed to the highly coherent and nonionizing nature of terahertz radiation, wide unallocated frequency bands, distinctive wavelengths, and their penetration through a significant depth of dielectric materials. Terahertz technology is geared toward realizing devices that can efficiently manipulate the phase, amplitude, and polarization of terahertz radiations for the above-mentioned myriad of applications.However, progress in this domain is held back by low terahertz power available from compact sources, high free-space path loss, and limited choice of materials that exhibit less absorption of terahertz waves. [17] Owing to the fact that natural materials demonstrate weak wave-matter interaction at terahertz frequencies, terahertz devices with engineered subwavelength resonant metallic inclusions on dielectric spacers have been realized, to interact strongly with an incident electromagnetic wave.In the past, metamaterials have been a promising route to building terahertz devices. These devices have in essence been engineered as 3D resonating elements that effectively manipulate both permittivity and permeability of an effective medium to couple to free space. The underlining disadvantage of these structures is the difficulty involved in the fabrication of 3D geometrical structures using standard semiconductor fabrication techniques. Standard fabrication techniques are generally amenable to 2D design with extrusion of these structures into thickness (the third, vertical dimension). Moreover, the choice and availability of dielectric materials and metals that provide sufficient interaction while retaining device efficiency has proved challenging. [13,[18][19][20] Recently, effective manipulation of electromagnetic wave has been widely demonstrated with 2D metasurfaces, which were originally employed as building blocks for 3D metamaterials. In these lower-dimension designs, effective manipulation of terahertz waves for various applications is achieved by carefully designing sub-wavelength resonant structures as is evident in published review articles. [21,22] Metasurfaces present high degree of compactness that enhances radiation efficiency. Additionally, the planar form factor of metasurfaces enables Manipulation of terahertz radiation opens new opportunities that underpin application areas in communication, security, material sensing, and characterization. Metasurfaces employed for terahertz manipulation of phase, amplitude, or polarization of terahertz waves have limitations in radiation efficiency which is attributed to losses in the materials constituting the devices. Metallic resonators-based terahertz devices suffer from high ohmic losses, while dielectric substrates and spacers with high relative permittivity and loss tangent also reduce bandwidth and efficiency. To overcome these issues, a proper choice of low loss and low relative permittivi...

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Section: Dielectric Materials As Resonant Elements and Structuresmentioning

confidence: 99%

Section: Lossless Dielectric Materialsmentioning

confidence: 99%

Section: Lossless Dielectric Materialsmentioning

confidence: 99%

Section: Lossless Dielectric Materialsmentioning

confidence: 99%

See 2 more Smart Citations

Dielectrics for Terahertz Metasurfaces: Material Selection and Fabrication Techniques

Ako

Upadhyay

Withayachumnankul

et al. 2019

Advanced Optical Materials

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show abstract

“…The recent metamaterial advancements have inspired the exploration of many extraordinary phenomena, including the negative refractive index [1,2], sensing [3], electromagnetic cloaking [4,5], perfect absorber [6,7], and superlenses [8]. Precisely, metamaterials are artificial designed periodic structure arrays that exhibit great flexibility in custom-built functionalities, which are determined by size, shape, and arrangement.…”

Section: Introductionmentioning

confidence: 99%

Controllable all-optical modulation speed in hybrid silicon-germanium devices utilizing the electromagnetically induced transparency effect

et al. 2020

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AbstractIncorporating auxiliary all-optical modulation speeds as optional response modes into a single metamaterial is a promising research route towards advanced terahertz (THz) applications ranging from spectroscopy and sensing to communications. Particularly, a plethora of dynamically tunable optical functionalities are determined by the resonant light-matter interactions. Here, an electromagnetically induced transparency (EIT) resonator stacked with two traditional semiconductor films, namely silicon (Si) and germanium (Ge), is experimentally demonstrated. A giant switching feature of the EIT window with a peak at 0.65 THz occurs when the Si or Ge film is excited by ultrafast optical pulses, allowing for an optically tunable group delay of the THz wave packet. The recovery time for the slow and fast on-off-on switching cycles is 1.7 ns and 11 ps, respectively, which are mapped as the pump delay time of Si and Ge. Two optional response modes are integrated on the same device, where the modulation speed varies by three orders of magnitude, endowing the modulator more compact. This work provides new prospects for the design and construction of novel chip-scale THz devices based on EIT and their applications in areas of sophisticated optical buffering and active filtering.

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Review of Broadband Metamaterial Absorbers: From Principles, Design Strategies, and Tunable Properties to Functional Applications

Wang

Duan

et al. 2023

Adv Funct Materials

111

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Metamaterial absorbers have been widely studied and continuously concerned owing to their excellent resonance features of ultra-thin thickness, light-weight, and high absorbance. Their applications, however, are typically restricted by the intrinsic dispersion of materials and strong resonant features of patterned arrays (mainly referring to narrow absorption bandwidth). It is, therefore essential to reassert the principles of building broadband metamaterial absorbers (BMAs). Herein, the research progress of BMAs from principles, design strategies, tunable properties to functional applications are comprehensively and deeply summarized. Physical principles behind broadband absorption are briefly discussed, typical design strategies in realizing broadband absorption are further emphasized, such as top-down lithography, bottom-up self-assembly, and emerging 3D printing technology. Diversified active components choices, including optical response, temperature response, electrical response, magnetic response, mechanical response, and multi-parameter responses, are reviewed in achieving dynamically tuned broadband absorption. Following this, the achievements of various interdisciplinary applications for BMAs in energy-harvesting, photodetectors, radar-IR dual stealth, bolometers, noise absorbing, imaging, and fabric wearable are summarized. Finally, the challenges and perspectives for future development of BMAs are discussed.

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Optically Modulated Ultra-Broadband All-Silicon Metamaterial Terahertz Absorbers

Cited by 185 publications

References 39 publications

Dielectrics for Terahertz Metasurfaces: Material Selection and Fabrication Techniques

Dielectrics for Terahertz Metasurfaces: Material Selection and Fabrication Techniques

Controllable all-optical modulation speed in hybrid silicon-germanium devices utilizing the electromagnetically induced transparency effect

Review of Broadband Metamaterial Absorbers: From Principles, Design Strategies, and Tunable Properties to Functional Applications

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