Abstract:HfO2 thin films are deposited on K9 glass by Kaufman ion source assisted electron beam evaporation. The X-ray diffraction (XRD) results show that the films presented monoclinic phase. Spectroscopic ellipsometer SE850 is used to test elliptic partial parameters in 280~2500 nm waveband, and Cauchy index model, Tauc-Lorentz model, Forouhi-Bloomer model, Sellmeier-Transparent model are used to analyze the ellipsometric data with considering rough surface layer and interface layer, and optical parameters are obtain… Show more
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