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1992
DOI: 10.1007/bf02655831
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Wide-gap semiconductor InGaN and InGaAln grown by MOVPE

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Cited by 254 publications
(126 citation statements)
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“…The etch rate of the back side in HCl was observed to double-check the assignment. [5] The substrate was outgassed at 700°C in vacuum before growth. Even at 600°C, Zn coming off the substrate was observable on the quadrupole mass spectrometer in the vacuum system.…”
Section: Substrate Preparationmentioning
confidence: 99%
See 1 more Smart Citation
“…The etch rate of the back side in HCl was observed to double-check the assignment. [5] The substrate was outgassed at 700°C in vacuum before growth. Even at 600°C, Zn coming off the substrate was observable on the quadrupole mass spectrometer in the vacuum system.…”
Section: Substrate Preparationmentioning
confidence: 99%
“…The polarity of a substrate can be measured quite easily and unambiguously by measuring the sign of the piezoelectric coefficient, or by measuring etch rates in HCl or H 2 NO 3 . [5] Although ZnO has been touted as a promising substrate for GaN and InGaN growth, [5] it has had a history of disappointing results. [6] Because ZnO is attacked at high temperatures in reducing atmospheres, growth by MOVPE and similar techniques must be done under sub-optimum conditions.…”
Section: Introductionmentioning
confidence: 99%
“…1,2 They have been identified by x-ray diffraction, low energy electron diffraction, 3 photoelectron diffraction, 4 coaxial impact-collision ion scattering spectroscopy, 5 the sign of the piezoelectric coefficient, and etch rate measurements in HCl or H 2 NO. 6 In the current paper we compare photoluminescence ͑PL͒ measurements on the two polar faces of ZnO. Results from the two faces have much in common-the strongest emission comes from a set of lines associated with neutraldonor-bound excitation (D 0 ,X) complexes 7 -but there are two major differences.…”
Section: Introductionmentioning
confidence: 97%
“…1,2 Recently we have shown the advantages of using quaternary AlInGaN layers for the fabrication of high quality quantum structures [3][4][5] with strong UV emission at room temperature. 6 Due to an independent tunability of band gap and lattice constant the quaternary AlInGaN alloys provide an excellent vehicle for band engineering [7][8][9] and the investigation of strain and built-in electric field effects in quantum wells. 10 In this letter, we present a systematic study of the photoluminescence ͑PL͒ of quaternary AlInGaN MQW structures with a band to band emission at 320 nm.…”
mentioning
confidence: 99%