2013
DOI: 10.1016/j.mee.2013.03.158
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Wide-bandwidth piezoelectric energy harvester integrated with parylene-C beam structures

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Cited by 25 publications
(15 citation statements)
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“…Similarly, Huang et al. describe a MEMS piezoelectric ambient energy harvesting device based on silicon proof‐mass with four parylene‐C beam structures and a piezoelectric PVDF layer. To achieve a wide‐frequency range between 200 and 600 Hz, the piezoelectric film is bonded with the beam structure to get tensile stretching strain.…”
Section: Rationalization For Ambient Energy Harvestingmentioning
confidence: 99%
See 1 more Smart Citation
“…Similarly, Huang et al. describe a MEMS piezoelectric ambient energy harvesting device based on silicon proof‐mass with four parylene‐C beam structures and a piezoelectric PVDF layer. To achieve a wide‐frequency range between 200 and 600 Hz, the piezoelectric film is bonded with the beam structure to get tensile stretching strain.…”
Section: Rationalization For Ambient Energy Harvestingmentioning
confidence: 99%
“…For example, Wacharasindhu and Kwon [63] developed an integrated micromachined electromagnetic and piezoelectric energy harvester capable of generating a maximum power of 40.8 lW across 3 MO resistance for the piezoelectric element, and up to 11.6 pW across a 700 O for electromagnetic element. Similarly, Huang et al [65] describe a MEMS piezoelectric ambient energy harvesting device based on silicon proof-mass with four parylene-C beam structures and a piezoelectric PVDF layer. To achieve a wide-frequency range between 200 and 600 Hz, the piezoelectric film is bonded with the beam structure to get tensile stretching strain.…”
Section: Piezoelectric Materials Modules/prototypes For Energy Harvesmentioning
confidence: 99%
“…Furthermore,f or harvesting ample energy over aw ide band of frequencies, many researchers have introduced nonlinear generators whereby nonlinear stiffness effects are used to increase the operating range. [16][17][18][19][20][21][22][23] Then onlinear energy harvester can take the form of abistable oscillator with cubic nonlinear stiffness typically introduced by using magnets. Ferrarie tal.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, it has a long service life. 4,5 There have been many vibration piezoelectric energy harvesters demonstrated in the literature; the designs of most vibration piezoelectric energy harvesters were based on monospar, 6,7,10 but in fact, the high output and micro-size could not be obtained at the same time. On one hand, the pursuit of high output power leads to the size of the beam that is bigger and bigger.…”
Section: Introductionmentioning
confidence: 99%