Wide-band “black silicon” based on porous silicon

L., L.; Zhou, Yunyan; Jiang, Nan; Lu, Xiaochuan; Shao, Jianda; Lü, Wei; Ge, Jian; Ding, Xinyi; Hou, Xiaoyuan

doi:10.1063/1.2199593

Cited by 158 publications

(92 citation statements)

References 17 publications

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“…However, subwavelength surface texture on silicon is known to produce "black silicon" with a broadband antireflection at a far wider acceptance angle than single or multilayer antireflection films. [1][2][3][4][5] This nanometerscale texture also increases the Si surface area for other applications. [6][7][8] Black silicon texture has been produced by techniques including laser-chemical, 1 electrochemical, 2 and reactive-ion etching.…”

Section: Nanostructured Black Silicon and The Optical Reflectance Of mentioning

confidence: 99%

Nanostructured black silicon and the optical reflectance of graded-density surfaces

Branz

Yost

Ward

et al. 2009

Applied Physics Letters

309

209

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We fabricate and measure graded-index “black silicon” surfaces and find the underlying scaling law governing reflectance. Wet etching (100) silicon in HAuCl4, HF, and H2O2 produces Au nanoparticles that catalyze formation of a network of [100]-oriented nanopores. This network grades the near-surface optical constants and reduces reflectance to below 2% at wavelengths from 300 to 1000 nm. As the density-grade depth increases, reflectance decreases exponentially with a characteristic grade depth of about 1/8 the vacuum wavelength or half the wavelength in Si. Observation of Au nanoparticles at the ends of cylindrical nanopores confirms local catalytic action of moving Au nanoparticles.

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Section: Nanostructured Black Silicon and The Optical Reflectance Of mentioning

confidence: 99%

Nanostructured black silicon and the optical reflectance of graded-density surfaces

Branz

Yost

Ward

et al. 2009

Applied Physics Letters

309

209

View full text Add to dashboard Cite

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“…Black silicon texture has been produced by techniques including laser-chemical, 26 electrochemical, 27 and reactive-ion etching. 28 Whatever the production technique, a black silicon surface generally exhibits quasiperiodical conical structures of height and a period of a few microns (Fig.…”

Section: Black Siliconmentioning

confidence: 99%

Optical properties of nanostructured materials: a review

2011

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Abstract. Depending on the size of the smallest feature, the interaction of light with structured materials can be very different. This fundamental problem is treated by different theories. If first order theories are sufficient to describe the scattering from low roughness surfaces, second order or even higher order theories must be used for high roughness surfaces. Random surface structures can then be designed to distribute the light in different propagation directions. For complex structures such as black silicon, which reflects very little light, the theory needs further development. When the material is periodically structured, we speak about photonic crystals or metamaterials. Different theoretical approaches have been developed and experimental techniques are rapidly progressing. However, some work still remains to understand the full potential of this field. When the material is structured in dimension much smaller than the wavelength, the notion of complex refractive index must be revisited. Plasmon resonance can be excited by a progressing wave on metallic nanoparticles inducing a shaping of the absorption band and of the dispersion of the extinction coefficient. This addresses the problem of the permittivity of such metallic nanoparticles. The coupling between several metallic nanoparticles induces a field enhancement in the surrounding media, which can increase phenomena like scattering, absorption, luminescence, or Raman scattering. For semiconductor nanoparticles, electron confinement also induces a modulated absorption spectra. The refractive index is then modified. The bandgap of the material is changed because of the discretization of the electron energy, which can be controlled by the nanometers size particles. Such quantum dots behave like atoms and become luminescent. The lifetime of the electron in the excited states are much larger than in continuous energy bands. Electrons in coupled quantum dots behave as they do in molecules. Many applications should be forthcoming in the near future in this field of research. C 2011 Society of Photo-Optical Instrumentation Engineers (SPIE).

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“…22,23 There are several processing methods available for modifying the Si surface morphology. 1,5,7,[13][14][15]17,19,24,25 For example, etching methods, including chemical, electrochemical and dry etching, have been widely employed. 26,27 Dynamic etching of porous Si surfaces to a thickness of 100 nm has been demonstrated by Striemer and Fauchet, 27 who achieved an average reflection of 3.7% across the terrestrial solar spectrum.…”

Section: Introductionmentioning

confidence: 99%

Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing

et al. 2014

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Light collection efficiency is an important factor that affects the performance of many optical and optoelectronic devices. In these devices, the high reflectivity of interfaces can hinder efficient light collection. To minimize unwanted reflection, anti-reflection surfaces can be fabricated by micro/nanopatterning. In this paper, we investigate the fabrication of broadband anti-reflection Si surfaces by laser micro/nanoprocessing. Laser direct writing is applied to create microstructures on Si surfaces that reduce light reflection by light trapping. In addition, laser interference lithography and metal assisted chemical etching are adopted to fabricate the Si nanowire arrays. The anti-reflection performance is greatly improved by the high aspect ratio subwavelength structures, which create gradients of refractive index from the ambient air to the substrate. Furthermore, by decoration of the Si nanowires with metallic nanoparticles, surface plasmon resonance can be used to further control the broadband reflections, reducing the reflection to below 1.0% across from 300 to 1200 nm. An average reflection of 0.8% is achieved.

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Wide-band “black silicon” based on porous silicon

Cited by 158 publications

References 17 publications

Nanostructured black silicon and the optical reflectance of graded-density surfaces

Nanostructured black silicon and the optical reflectance of graded-density surfaces

Optical properties of nanostructured materials: a review

Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing

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