What MEMS Research and Development Can Learn from a Production Environment

Abstract

The intricate interdependency of device design and fabrication process complicates the development of microelectromechanical systems (MEMS). Commercial pressure has motivated industry to implement various tools and methods to overcome challenges and facilitate volume production. By now, these are only hesitantly being picked up and implemented in academic research. In this perspective, the applicability of these methods to research-focused MEMS development is investigated. It is found that even in the dynamics of a research endeavor, it is beneficial to adapt and apply tools and methods deduced from volume production. The key step is to change the perspective from fabricating devices to developing, maintaining and advancing the fabrication process. Tools and methods are introduced and discussed, using the development of magnetoelectric MEMS sensors within a collaborative research project as an illustrative example. This perspective provides both guidance to newcomers as well as inspiration to the well-versed experts.

MEMS capacitive accelerometer: A review

“…Since the design and production of MEMS is complex, manufacturability design is very important to reduce the time and effort spent on accurate production [8]. Fabrication of MEMS structures often uses structural, sacrificial, and masking materials on a common substrate, so issues related to etching selectivity, adhesion, microstructure, and a number of other properties are very important parameters in the design process [9].…”